LEADER 05163nam 2200637Ia 450 001 9911006673703321 005 20230421041452.0 010 $a1-282-00262-7 010 $a0-08-094588-0 010 $a0-8155-1746-7 035 $a(CKB)111056552536402 035 $a(EBL)693141 035 $a(OCoLC)726734914 035 $a(SSID)ssj0000072167 035 $a(PQKBManifestationID)11969533 035 $a(PQKBTitleCode)TC0000072167 035 $a(PQKBWorkID)10092012 035 $a(PQKB)10159498 035 $a(MiAaPQ)EBC693141 035 $a(EXLCZ)99111056552536402 100 $a19930721d1994 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aHandbook of deposition technologies for films and coatings $escience, technology, and applications /$fedited by Rointan F. Bunshah 205 $a2nd ed. 210 $aPark Ridge, N.J. $cNoyes Publications$dc1994 215 $a1 online resource (887 p.) 225 0 $aMaterials science and process technology seriess 300 $aRev. ed. of: Deposition technologies for films and coatings. c1982. 311 $a1-59124-045-X 311 $a0-8155-1337-2 320 $aIncludes bibliographical references and index. 327 $aFront Cover; Handbook of Ellipsometry; Copyright Page; Contents; Part 1: Theory of Ellipsometry; Chapter 1. Polarized Light and Ellipsometry; 1.1 A Quick Guide to Ellipsometry; 1.2 Maxwell and Wave Equations; 1.3 Representations of Polarization; 1.4 Propagation of Polarized Light; 1.5 Reflection and Transmission of Polarized Light at Planar Interfaces; 1.6 References; Chapter 2. Optical Physics of Materials; 2.1 Introduction; 2.2 Propagation of Light in Solids; 2.3 Classical Theories of the Optical Properties of Solids; 2.4 Quantum Mechanical Theories of the Optical Properties of Solids 327 $a2.5 Modeling the Optical Properties of Solids2.6 Overview and Concluding Remarks; 2.7 References and Bibliography; Chapter 3. Data Analysis for Spectroscopic Ellipsometry; 3.1 Introduction; 3.2 Ellipsometry Parameters; 3.3 Calculation of Complex Reflection Coefficients; 3.4 Models for Dielectric Functions; 3.5 Fitting Models to Data; 3.6 Determination of Optical Functions from Spectroscopic Ellipsometry Data; 3.7 Depolarization; 3.8 Further Reading and References; Part 2: Instrumentation; Chapter 4. Optical Components and the Simple PCSA (Polarizer, Compensator, Sample, Analyzer) Ellipsometer 327 $a4.1 General4.2 The Components; 4.3 Ellipsometer Component Configurations; 4.4 References; Chapter 5. Rotating Polarizer and Analyzer Ellipsometry; 5.1 Introduction; 5.2 Comparison of Ellipsometers; 5.3 Instrumentation Issues; 5.4 Data Reduction for the Rotating Polarizer and Analyzer Ellipsometers; 5.5 Precision Considerations; 5.6 Calibration Procedures; 5.7 Summary: Recent and Future Directions; 5.8 References; Chapter 6. Polarization Modulation Ellipsometry; 6.1 Introduction; 6.2 The Photoelastic Modulator (PEM); 6.3 Experimental Configurations of Polarization Modulation Ellipsometers 327 $a6.4 Light Intensity Through a Polarization Modulation Ellipsometer6.5 Waveform Analysis; 6.6 Calibration Procedures; 6.7 Errors; 6.8 Further Reading and References; Chapter 7. Multichannel Ellipsometry; 7.1 Introduction; 7.2 Overview of Instrumentation; 7.3 Rotating-Element Designs; 7.4 Concluding Remarks; 7.5 References; Part 3: Critical Reviews of Some Applications; Chapter 8. SiO2 Films; 8.1 Introduction; 8.2 Historical Perspective - Prior to 1970; 8.3 Modern Studies - Since 1970; 8.4 Conclusions; 8.5 References; Chapter 9. Theory and Application of Generalized Ellipsometry 327 $a9.1 Introduction9.2 The Generalized Ellipsometry Concept; 9.3 Theory of Generalized Ellipsometry; 9.4 Special Generalized Ellipsometry Solutions; 9.5 Strategies in Generalized Ellipsometry; 9.6 Generalized Ellipsometry Applications; 9.7 Conclusions; 9.8 Further Reading and References; Part 4: Emerging Areas in Ellipsometry; Chapter 10. VUV Ellipsometry; 10.1 Introduction; 10.2 Historical Review of Short Wavelength Ellipsometry; 10.3 VUV Ellipsometry Today; 10.4 Importance of VUV Ellipsometry; 10.5 Survey of Applications; 10.6 Future of VUV Ellipsometry; 10.7 Acknowledgments; 10.8 References 327 $aChapter 11. Spectroscopic Infrared Ellipsometry 330 $aThis second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications. 606 $aCoating processes 606 $aSurfaces (Technology) 615 0$aCoating processes. 615 0$aSurfaces (Technology) 676 $a620.1 676 $a667/.9 701 $aBunshah$b R. F$g(Rointan Framroze)$022392 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911006673703321 996 $aHandbook of deposition technologies for films and coatings$94391263 997 $aUNINA