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001 9911006661203321
005 20241108152020.0
010   $a1-282-00281-3
010   $a9786612002816
010   $a0-8155-1771-8
010   $a1-59124-294-0
035   $a(CKB)111056552535330
035   $a(EBL)3008673
035   $a(SSID)ssj0000072253
035   $a(PQKBManifestationID)11980108
035   $a(PQKBTitleCode)TC0000072253
035   $a(PQKBWorkID)10093779
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035   $a(MiAaPQ)EBC3008673
035   $a(BIP)46733936
035   $a(BIP)689249
035   $a(EXLCZ)99111056552535330
100   $a19891206d1990      uy         0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aHandbook of semiconductor silicon technology /$fedited by William C. O'Mara, Robert B. Herring, Lee P. Hunt
210   $aPark Ridge, N.J., U.S.A. $cNoyes Publications$dc1990
215   $a1 online resource (816 p.)
225 1 $aMaterials science and process technology series
300   $aDescription based upon print version of record.
311 08$a0-8155-1237-6 
320   $aIncludes bibliographical references and index.
327   $a""Preface""; ""Contributors""; ""Contents""; ""1 Silicon Precursors: Their Manufacture and Properties""; ""2 Polysilicon Preparation""; ""3 Crystal Growth of Silicon""; ""4 Silicon Wafer Preparation""; ""5 Silicon Epitaxy""; ""6 Silicon Material Properties""; ""7 Oxygen, Carbon and Nitrogen in Silicon""; ""8 Carrier Lifetimes in Silicon""; ""9 Preparation and Properties of Polycrystalline-Silicon Films""; ""10 Silicon Phase Diagrams""; ""Index""
330   $aThis handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.
410  0$aMaterials science and process technology series.$pElectronic materials and process technology.
606   $aSemiconductors$vHandbooks, manuals, etc
606   $aSilicon crystals$vHandbooks, manuals, etc
615  0$aSemiconductors
615  0$aSilicon crystals
676   $a621.381/52
701   $aO'Mara$b William C$01822166
701   $aHerring$b Robert B$01822167
701   $aHunt$b Lee P$g(Lee Philip)$01822168
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9911006661203321
996   $aHandbook of semiconductor silicon technology$94388245
997   $aUNINA