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100   $a20120719d2012      fy         0
101 0 $aeng
135   $aurbn#|||m|||a
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aIntroduction to semiconductor manufacturing technology /$fHong Xiao
205   $aSecond edition
210  1$aBellingham, Wash. :$cSPIE,$d[2012]
210  4$d©2012
215   $a1 online resource (704 pages)
225 1 $aSPIE Press monograph ;$vPM220
300   $aDescription based upon print version of record.
311 1 $a9780819490926 
311 1 $a0-8194-9092-X 
320   $aIncludes bibliographical references.
327   $aPreface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary.
330   $aIntegrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.
410  0$aSPIE Press monograph ;$vPM220.
606   $aSemiconductors$xDesign and construction
606   $aSemiconductor industry
606   $aSemiconductors$xDisseny i construcció$2lemac
606   $aSemiconductors$xIndústria i comerç$2lemac
615  0$aSemiconductors$xDesign and construction.
615  0$aSemiconductor industry.
615  7$aSemiconductors$xDisseny i construcció.
615  7$aSemiconductors$xIndústria i comerç
676   $a621.3815/2
700   $aXiao$b Hong$0524778
712 02$aSociety of Photo-Optical Instrumentation Engineers.
801  0$bCaBNVSL
801  1$bCaBNVSL
801  2$bCaBNVSL
906   $aBOOK
912   $a9911006553303321
996   $aIntroduction to semiconductor manufacturing technology$94391654
997   $aUNINA