LEADER 01506oam 2200481zu 450 001 9911004853503321 005 20210807004023.0 010 $a1-878068-29-6 035 $a(CKB)2490000000000111 035 $a(SSID)ssj0000668718 035 $a(PQKBManifestationID)11373006 035 $a(PQKBTitleCode)TC0000668718 035 $a(PQKBWorkID)10700405 035 $a(PQKB)10801304 035 $a(WaSeSS)Ind00030583 035 $a(NjHacI)992490000000000111 035 $a(EXLCZ)992490000000000111 100 $a20160829d2009 uy 101 0 $aeng 135 $aur||||||||||| 181 $ctxt 182 $cc 183 $acr 200 00$aSVC 52nd Annual Technical Conference Proceedings 210 31$a[Place of publication not identified]$cSociety of Vacuum Coaters$d2009 215 $a1 online resource (795 p.) 300 $aBibliographic Level Mode of Issuance: Monograph 311 $a1-61583-157-6 320 $aIncludes index. 517 1 $aSociety of Vacuum Coaters 606 $aMechanical Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 606 $aMechanical Engineering - General$2HILCC 615 7$aMechanical Engineering 615 7$aEngineering & Applied Sciences 615 7$aMechanical Engineering - General 676 $a671.735 712 02$aSociety of Vacuum Coaters, 801 0$bPQKB 906 $aBOOK 912 $a9911004853503321 996 $aSVC 52nd Annual Technical Conference Proceedings$94392666 997 $aUNINA