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100   $a20101004d2011      uy         0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aPhysics of radio-frequency plasmas /$fPascal Chabert, Nicholas Braithwaite
210   $aCambridge ;$aNew York $cCambridge University Press$d2011
215   $a1 online resource (viii, 385 pages) $cdigital, PDF file(s)
300   $aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
311   $a0-521-76300-2 
320   $aIncludes bibliographical references and index.
327   $aMachine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index.
330   $aLow-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
606   $aLow temperature plasmas
606   $aRadio frequency
615  0$aLow temperature plasmas.
615  0$aRadio frequency.
676   $a621.044
686   $aSCI055000$2bisacsh
700   $aChabert$b Pascal$f1969-$01821833
701   $aBraithwaite$b Nicholas$g(Nicholas St. J.)$01821834
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9911004843503321
996   $aPhysics of radio-frequency plasmas$94387744
997   $aUNINA