LEADER 05267nam 22006134a 450 001 9911004801103321 005 20200520144314.0 010 $a0-8155-1747-5 010 $a1-282-00263-5 010 $a9786612002632 010 $a9786612002625 010 $a1-59124-849-3 035 $a(CKB)1000000000210826 035 $a(EBL)428543 035 $a(OCoLC)437112387 035 $a(SSID)ssj0000072170 035 $a(PQKBManifestationID)11980100 035 $a(PQKBTitleCode)TC0000072170 035 $a(PQKBWorkID)10095721 035 $a(PQKB)11195608 035 $a(MiAaPQ)EBC428543 035 $a(EXLCZ)991000000000210826 100 $a20040622d2005 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aHandbook of ellipsometry /$fedited by Harland G. Tompkins and Eugene A. Irene 210 $aNorwich, NY $cWilliam Andrew Pub. ;$aHeidelberg, Germany $cSpringer$dc2005 215 $a1 online resource (887 p.) 300 $aDescription based upon print version of record. 311 $a0-08-094706-9 311 $a0-8155-1499-9 320 $aIncludes bibliographical references and index. 327 $aFront Cover; Handbook of Ellipsometry; Copyright Page; Contents; Part 1: Theory of Ellipsometry; Chapter 1. Polarized Light and Ellipsometry; 1.1 A Quick Guide to Ellipsometry; 1.2 Maxwell and Wave Equations; 1.3 Representations of Polarization; 1.4 Propagation of Polarized Light; 1.5 Reflection and Transmission of Polarized Light at Planar Interfaces; 1.6 References; Chapter 2. Optical Physics of Materials; 2.1 Introduction; 2.2 Propagation of Light in Solids; 2.3 Classical Theories of the Optical Properties of Solids; 2.4 Quantum Mechanical Theories of the Optical Properties of Solids 327 $a2.5 Modeling the Optical Properties of Solids2.6 Overview and Concluding Remarks; 2.7 References and Bibliography; Chapter 3. Data Analysis for Spectroscopic Ellipsometry; 3.1 Introduction; 3.2 Ellipsometry Parameters; 3.3 Calculation of Complex Reflection Coefficients; 3.4 Models for Dielectric Functions; 3.5 Fitting Models to Data; 3.6 Determination of Optical Functions from Spectroscopic Ellipsometry Data; 3.7 Depolarization; 3.8 Further Reading and References; Part 2: Instrumentation; Chapter 4. Optical Components and the Simple PCSA (Polarizer, Compensator, Sample, Analyzer) Ellipsometer 327 $a4.1 General4.2 The Components; 4.3 Ellipsometer Component Configurations; 4.4 References; Chapter 5. Rotating Polarizer and Analyzer Ellipsometry; 5.1 Introduction; 5.2 Comparison of Ellipsometers; 5.3 Instrumentation Issues; 5.4 Data Reduction for the Rotating Polarizer and Analyzer Ellipsometers; 5.5 Precision Considerations; 5.6 Calibration Procedures; 5.7 Summary: Recent and Future Directions; 5.8 References; Chapter 6. Polarization Modulation Ellipsometry; 6.1 Introduction; 6.2 The Photoelastic Modulator (PEM); 6.3 Experimental Configurations of Polarization Modulation Ellipsometers 327 $a6.4 Light Intensity Through a Polarization Modulation Ellipsometer6.5 Waveform Analysis; 6.6 Calibration Procedures; 6.7 Errors; 6.8 Further Reading and References; Chapter 7. Multichannel Ellipsometry; 7.1 Introduction; 7.2 Overview of Instrumentation; 7.3 Rotating-Element Designs; 7.4 Concluding Remarks; 7.5 References; Part 3: Critical Reviews of Some Applications; Chapter 8. SiO2 Films; 8.1 Introduction; 8.2 Historical Perspective - Prior to 1970; 8.3 Modern Studies - Since 1970; 8.4 Conclusions; 8.5 References; Chapter 9. Theory and Application of Generalized Ellipsometry 327 $a9.1 Introduction9.2 The Generalized Ellipsometry Concept; 9.3 Theory of Generalized Ellipsometry; 9.4 Special Generalized Ellipsometry Solutions; 9.5 Strategies in Generalized Ellipsometry; 9.6 Generalized Ellipsometry Applications; 9.7 Conclusions; 9.8 Further Reading and References; Part 4: Emerging Areas in Ellipsometry; Chapter 10. VUV Ellipsometry; 10.1 Introduction; 10.2 Historical Review of Short Wavelength Ellipsometry; 10.3 VUV Ellipsometry Today; 10.4 Importance of VUV Ellipsometry; 10.5 Survey of Applications; 10.6 Future of VUV Ellipsometry; 10.7 Acknowledgments; 10.8 References 327 $aChapter 11. Spectroscopic Infrared Ellipsometry 330 $aThe Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the 606 $aEllipsometry 615 0$aEllipsometry. 676 $a620.1/1295 701 $aTompkins$b Harland G$0727342 701 $aIrene$b Eugene A$01686066 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911004801103321 996 $aHandbook of ellipsometry$94391994 997 $aUNINA