LEADER 01337oam 2200421zu 450 001 9911004776603321 005 20210807003518.0 010 $a1-59124-158-8 035 $a(CKB)111086367656414 035 $a(SSID)ssj0000668708 035 $a(PQKBManifestationID)11955954 035 $a(PQKBTitleCode)TC0000668708 035 $a(PQKBWorkID)10703549 035 $a(PQKB)11591344 035 $a(WaSeSS)Ind00030393 035 $a(EXLCZ)99111086367656414 100 $a20160829d1998 uy 101 0 $aeng 135 $aur||||||||||| 181 $ctxt 182 $cc 183 $acr 200 10$aSVC 41st Annual Technical Conference Proceedings 210 31$a[Place of publication not identified]$cSociety of Vacuum Coaters$d1998 215 $a1 online resource (516 p.) 300 $aBibliographic Level Mode of Issuance: Monograph 517 1 $aSociety of Vacuum Coaters 606 $aMechanical Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 606 $aIndustrial & Management Engineering$2HILCC 615 7$aMechanical Engineering 615 7$aEngineering & Applied Sciences 615 7$aIndustrial & Management Engineering 801 0$bPQKB 906 $aBOOK 912 $a9911004776603321 996 $aSVC 41st Annual Technical Conference Proceedings$94392864 997 $aUNINA