LEADER 04229nam 2200625Ia 450 001 9911004757303321 005 20200520144314.0 010 $a1-282-28497-5 010 $a9786612284977 010 $a0-08-053654-9 035 $a(CKB)1000000000384006 035 $a(EBL)452882 035 $a(OCoLC)183633551 035 $a(SSID)ssj0000072524 035 $a(PQKBManifestationID)11980027 035 $a(PQKBTitleCode)TC0000072524 035 $a(PQKBWorkID)10115622 035 $a(PQKB)10758558 035 $a(MiAaPQ)EBC452882 035 $a(EXLCZ)991000000000384006 100 $a19980505d1998 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aMicro mechanical systems $eprinciples and technology /$fedited by T. Fukuda and W. Menz 210 $aAmsterdam ;$aNew York $cElsevier$d1998 215 $a1 online resource (278 p.) 225 1 $aHandbook of sensors and actuators ;$v6 300 $aDescription based upon print version of record. 311 $a0-444-82363-8 320 $aIncludes bibliographical references. 327 $aFront Cover; Micro Mechanical Systems: Principles and Technology; Copyright Page; Contents; Chapter 1. Introduction; Historical Background and Parallels to Microelectronics; The Motivation for Microsystem Technology; Microphysics and Design Considerations; From the Microcomponent to the Microsystem; Chapter 2. Photolithographic Microfabrication; Basic Concepts of Planar Processing; Materials; Unit Processes; Integrated Processes; Limitations of Planar Processes; Chapter 3. Micromachining by Machine Tools; Historical Aspects; Basics of Micromachine Tools; Microtool Preparation 327 $aWire Electrodischarge Grinding (WEDG)Micro EDM; Micro Mechanical Machining (MMM); Combined Method for Micromachining; Chapter 4. Tribological Aspects of Microsystems; Introduction; Tribology - Friction, Lubrication and Wear; Surface Structure and Tribilogical Contact; Friction and Wear; Materials for Reliable Micromechanical Systems; Chapter 5. Silicon Microsensors; Introduction; Fabrication; Performance of Micromechanical Sensors; Examples of Micromechanical Sensors; Chapter 6. Micro-Actuators for Micro-Robots: Electric and Magnetic; Introduction; Electric Field Driven Actuators 327 $aPiezoelectric Actuators Mechanical Transformers; Magnetic Field Driven Actuators; Chapter 7. Energy Source and Power Supply Method; Classification of Energy Supply Methods; Internal Supply Methods; External Supply Methods and Noncontact Manipulation; The Others; Chapter 8. Control Method of Micro Mechanical Systems; Control Principle; Scaling Effects; Intelligent Control; Man-Machine Interface; Chapter 9. Examples of Microsystems; Introduction; Examples of Microsystems; Examples of Micromachines; Chapter 10. Future Problems; The Complete Microsystem 327 $aThe Industrial Potential of Microsystem Technology The Importance of Standardization; Outlook 330 $aIn ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four dis 410 0$aHandbook of sensors and actuators ;$v6. 606 $aMicroelectromechanical systems$vHandbooks, manuals, etc 606 $aMicrotechnology$vHandbooks, manuals, etc 615 0$aMicroelectromechanical systems 615 0$aMicrotechnology 676 $a620.11299 676 $a621 21 676 $a621 701 $aFukuda$b T$g(Toshio),$f1948-$046541 701 $aMenz$b W$g(Wolfgang)$0971799 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9911004757303321 996 $aMicro mechanical systems$94388472 997 $aUNINA