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100   $a20250531|2025uuuu  ||         |
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aRetroreflex ellipsometry for nonplanar surfaces/$fChia-Wei Chen
210  1$aKarlsruhe :$cKIT Scientific Publishing,$d2025.
215   $a1 online resource
225 1 $aSchriftenreihe Automatische Sichtprüfung und Bildverarbeitung$vBand 24.
311 08$a3-7315-1402-8 
311 08$a9783731514022 
320   $aIncludes bibliographical references (pages) and index.
327   $tAbstract$tKurzfassung$tAcknowledgements$tNotation$tAcronyms$tIntroduction$tRelated work$tPolarized light and ellipsometry$tRetroreflex ellipsometry$tMeasurement methods and uncertainty analysis for nonplanar surfaces$tResults and discussion$tConclusion and outlook$tBibliography$tOwn publications$tList of Figures$tList of Tables.
330   $aConventional ellipsometry is limited to flat surfaces because precise alignment is required, making measurements on curved samples difficult and time-consuming. This work proposes retroreflex ellipsometry, which overcomes these geometric limitations by using a retroreflector to return light along the same path. The method enables accurate, nondestructive ellipsometric measurements on nonplanar surfaces, allowing the determination of angles of incidence, tilt, refractive index, and film thickness. Experimental results confirm high accuracy and show strong potential for inline and in-situ industrial quality control, including the characterization of freeform optics and complex-shaped surfaces.
410  0$aSchriftenreihe Automatische Sichtprüfung und Bildverarbeitung$vBand 24.
606   $aEllipsometry$xApplications
606   $aSurfaces (Technology)$xMeasurement
606   $aOptical measurements$xTechniques
606   $aScientific apparatus and instruments$xDesign and construction
615  0$aEllipsometry$xApplications.
615  0$aSurfaces (Technology)$xMeasurement.
615  0$aOptical measurements$xTechniques.
615  0$aScientific apparatus and instruments$xDesign and construction.
700   $aChen$b Chia-Wei$01818821
906   $aBOOK
912   $a9911003678403321
996   $aRetroreflex Ellipsometry for Nonplanar Surfaces$94378253
997   $aUNINA