LEADER 05291nam 2200721 a 450 001 9910960966703321 005 20251116140421.0 010 $a9786610211470 010 $a9781280211478 010 $a1280211474 010 $a9780309583954 010 $a0309583950 010 $a9780585149455 010 $a0585149453 035 $a(CKB)110986584751132 035 $a(OCoLC)44965115 035 $a(CaPaEBR)ebrary10055022 035 $a(SSID)ssj0000109385 035 $a(PQKBManifestationID)11128770 035 $a(PQKBTitleCode)TC0000109385 035 $a(PQKBWorkID)10046005 035 $a(PQKB)10649986 035 $a(Au-PeEL)EBL3376029 035 $a(CaPaEBR)ebr10055022 035 $a(CaONFJC)MIL21147 035 $a(OCoLC)923260597 035 $a(MiAaPQ)EBC3376029 035 $a(Perlego)4736077 035 $a(BIP)133917 035 $a(EXLCZ)99110986584751132 100 $a19920422d1992 uy 0 101 0 $aeng 135 $aurcn||||||||| 181 $ctxt 182 $cc 183 $acr 200 10$aBeam technologies for integrated processing $ereport of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council 205 $a1st ed. 210 $aWashington, D.C. $cNational Academy Press$d1992 215 $a1 online resource (101 p.) 300 $a"NMAB-461." 311 08$a9780309046350 311 08$a0309046351 320 $aIncludes bibliographical references. 327 $aBEAM TECHNOLOGIES FOR INTEGRATED PROCESSING -- Copyright -- ABSTRACT -- PREFACE -- ACKNOWLEDGMENTS -- Contents -- 1 Introduction -- 2 SUMMARY AND RECOMMENDATIONS -- SUMMARY -- Electronic Materials -- Engineered Materials -- Integrated Processing -- RECOMMENDATIONS -- 3 BEAM TECHNOLOGIES -- ATOMIC AND MOLECULAR MATERIAL BEAMS -- Physical Vapor Deposition -- Direct Evaporation Processes -- Direct Reactive Evaporation Processes -- Direct Sputtering Processes -- Reactive Sputtering Processes -- Ion Beam Sputtering Processes -- Molecular Beam Epitaxy -- Chemical Vapor Deposition Processes -- Microwave Electron Cyclotron Resonance Plasmas -- Ion Beams -- Energy Beams -- Laser Beams -- Electron Beams -- X-Ray Lithography -- Microwave Beams -- REFERENCES -- 4 BEAM APPLICATIONS IN MICROELECTRONICS -- BEAM APPLICATIONS IN SEMICONDUCTOR DEVICE MANUFACTURE -- Silicon Integrated Circuits -- Beam Technologies For Materials Deposition -- Beam Technologies For Patterning -- Beam Technologies For Etching -- BEAM TECHNOLOGIES FOR COMPOUND SEMICONDUCTOR ICS -- Beam Technologies For Materials Deposition -- Beam Technologies For Heating -- OPTOELECTRONICS -- REFERENCES -- 5 BEAM APPLICATIONS IN ENGINEERED MATERIALS -- COATINGS -- Diamond, Diamond-Like Carbon, And Cubic Boron Nitride Coatings -- SURFACE MODIFICATION -- APPLICATIONS OF LASERS TO MATERIALS FORMING -- Shaping And Removal -- Desktop Deposition -- Joining -- POWDER PREPARATION -- COMPOSITES FABRICATION -- Fiber And Whisker Preparation -- Metal-Matrix Composites Fabrication -- Ceramic-Matrix Composites Fabrication -- NANOPHASE MATERIALS -- OPTICAL SURFACES AND DEVICES -- POLYMERS -- MATERIALS FOR ENERGY PRODUCTION -- BIOIMPLANT DEVICES -- REFERENCES -- 6 INTEGRATED PROCESSING -- INTEGRATED PROCESSING IN MICROELECTRONICS -- Integrated Processing For Integrated Circuits. 327 $aTraditional Integrated Circuit Processing Techniques -- Advances Toward Integrated Processing -- Integrated Processing Tools -- Applications For Integrated Processing Tools -- INTEGRATED PROCESSING FOR METALS AND CERAMICS -- Architectural Glass Coatings -- In-Line Dry Coating Process For Stainless Steel Sheet -- Mechanical Fabrication -- REFERENCES -- 7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATION -- REFERENCE -- APPENDIX A ACRONYMS AND ABBREVIATIONS -- APPENDIX B BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS. 330 $aBeam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components. This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented. 606 $aMicroelectronics industry 606 $aMolecular beams$xIndustrial applications 606 $aMicroelectronics$xMaterials 606 $aPlasma-enhanced chemical vapor deposition$xIndustrial applications 615 0$aMicroelectronics industry. 615 0$aMolecular beams$xIndustrial applications. 615 0$aMicroelectronics$xMaterials. 615 0$aPlasma-enhanced chemical vapor deposition$xIndustrial applications. 676 $a621.381 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910960966703321 996 $aBeam technologies for integrated processing$94358438 997 $aUNINA