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200 10$aInertial MEMS $eprinciples and practice /$fVolker Kempe
210   $aCambridge ;$aNew York $cCambridge University Press$d2011
215   $a1 online resource (xiv, 475 pages) $cdigital, PDF file(s)
300   $aTitle from publisher's bibliographic system (viewed on 05 Oct 2015).
311   $a0-521-76658-3 
320   $aIncludes bibliographical references and index.
327   $aMachine generated contents note: Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index.
330   $aA practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.
606   $aMicroelectromechanical systems
606   $aInertial navigation systems
606   $aBioMEMS
615  0$aMicroelectromechanical systems.
615  0$aInertial navigation systems.
615  0$aBioMEMS.
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