LEADER 05356nam 2200673 a 450 001 9910877642003321 005 20200520144314.0 010 $a9780470014189 010 $a1-280-27255-4 010 $a9786610272556 010 $a0-470-34594-2 010 $a0-470-87035-4 010 $a0-470-01418-0 035 $a(CKB)1000000000018904 035 $a(EBL)210573 035 $a(OCoLC)608211015 035 $a(SSID)ssj0000246005 035 $a(PQKBManifestationID)11238394 035 $a(PQKBTitleCode)TC0000246005 035 $a(PQKBWorkID)10181149 035 $a(PQKB)10079565 035 $a(MiAaPQ)EBC210573 035 $a(EXLCZ)991000000000018904 100 $a20040429d2004 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aSilicon photonics $ean introduction /$fGraham T. Reed, Andrew P. Knights 210 $aChichester ;$aHoboken, NJ $cJohn Wiley$dc2004 215 $a1 online resource (277 p.) 300 $aDescription based upon print version of record. 311 1 $a9780470870341 311 1 $a0-470-87034-6 320 $aIncludes bibliographical references and index. 327 $aSilicon Photonics; Contents; About the Authors; Foreword; Acknowledgements; 1 Fundamentals; 1.1 What is Phase?; 1.2 What is Polarisation?; 1.3 What is Interference?; 2 The Basics of Guided Waves; 2.1 The Ray Optics Approach to Describing Planar Waveguides; 2.2 Reflection Coefficients; 2.3 Phase of a Propagating Wave and its Wavevector; 2.4 Modes of a Planar Waveguide; 2.4.1 The Symmetrical Planar Waveguide; 2.4.2 The Asymmetrical Planar Waveguide; 2.4.3 Solving the Eigenvalue Equations for Symmetrical and Asymmetrical Waveguides; 2.4.4 Monomode Conditions; 2.4.5 Effective Index of a Mode 327 $a2.5 A Taste of Electromagnetic Theory2.6 Simplifying and Solving the Wave Equation; 2.7 Another Look at Propagation Constants; 2.8 Mode Profiles; 2.9 Confinement Factor; 2.10 The Goos-Ha?nchen Shift; 3 Characteristics of Optical Fibres for Communications; 3.1 The Structure of Optical Fibres; 3.2 Modes of an Optical Fibre; 3.2.1 Modes of a Step-index Fibre; 3.2.2 Modes of a Graded-index Fibre; 3.3 Numerical Aperture and Acceptance Angle; 3.4 Dispersion in Optical Fibres; 3.4.1 Intermodal Dispersion; 3.4.2 Intramodal Dispersion 327 $a3.5 Single-mode Fibres: Mode Profile, Mode-field Diameter, and Spot Size3.6 Normalised Frequency, Normalised Propagation Constant, and Cutoff Wavelength; References; 4 Silicon-on-Insulator (SOI) Photonics; 4.1 Introduction; 4.2 Silicon-on-Insulator Waveguides; 4.2.1 Modes of Two-dimensional Waveguides; 4.3 The Effective Index Method of Analysis; 4.4 Large Single-mode Rib Waveguides; 4.5 Refractive Index and Loss Coefficient in Optical Waveguides; 4.6 Contributions to Loss in an Optical Waveguide; 4.6.1 Scattering; 4.6.2 Absorption; 4.6.3 Radiation; 4.7 Coupling to the Optical Circuit 327 $a4.7.1 Grating Couplers4.7.2 Butt Coupling and End-fire Coupling; 4.7.3 Robust Coupling to Waveguides for Commercial Applications; 4.7.4 Measurement of Propagation Loss in Integrated Optical Waveguides; 4.8 Optical Modulation Mechanisms in Silicon; 4.8.1 Electric Field Effects; 4.8.2 Carrier Injection or Depletion; 4.8.3 The Thermo-optic Effect; 4.9 Other Advantages and Disadvantages of Silicon Photonics; References; 5 Fabrication of Silicon Waveguide Devices; 5.1 Silicon-on-Insulator (SOI); 5.1.1 Separation by IMplanted OXygen (SIMOX); 5.1.2 Bond and Etch-back SOI (BESOI) 327 $a5.1.3 Wafer Splitting (SmartCut(®) Process to Produce Unibond(®) Wafers)5.1.4 Silicon Epitaxial Growth; 5.1.5 Deciding on the SOI; 5.2 Fabrication of Surface Etched Features; 5.2.1 Photolithography; 5.2.2 Silicon Etching; 5.2.3 Critical Dimension Control; 5.3 Oxidation; 5.4 Formation of Submicron Silicon Waveguides; 5.4.1 Silicon Dioxide Thickness; 5.4.2 Surface and Interface Roughness; 5.4.3 Sidewall Roughness; 5.5 Silicon Doping; 5.5.1 Ion Implantation; 5.5.2 The Implantation System; 5.5.3 Implantation Parameters; 5.5.4 Dopant Activation and Drive-in; 5.6 Metallisation; 5.6.1 Via Formation 327 $a5.6.2 Metal Deposition 330 $aThe growing demand for instant and reliable communication means that photonic circuits are increasingly finding applications in optical communications systems. One of the prime candidates to provide satisfactory performance at low cost in the photonic circuit is silicon. Whilst silicon photonics is less well developed as compared to some other material technologies, it is poised to make a serious impact on the telecommunications industry, as well as in many other applications, as other technologies fail to meet the yield/performance/cost trade-offs. Following a sympathetic tutorial approach, 606 $aOptoelectronic devices 606 $aSilicon$xOptical properties 606 $aPhotonics 615 0$aOptoelectronic devices. 615 0$aSilicon$xOptical properties. 615 0$aPhotonics. 676 $a621.38152 700 $aReed$b Graham T$0286110 701 $aKnights$b Andrew P$0286109 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910877642003321 996 $aSilicon photonics$9757863 997 $aUNINA