LEADER 02469nam 2200553 a 450 001 9910877458803321 005 20200520144314.0 010 $a3-527-64713-9 010 $a1-299-15734-3 010 $a3-527-64712-0 035 $a(CKB)2670000000328200 035 $a(EBL)1120882 035 $a(SSID)ssj0000884292 035 $a(PQKBManifestationID)11471286 035 $a(PQKBTitleCode)TC0000884292 035 $a(PQKBWorkID)10940021 035 $a(PQKB)10118380 035 $a(MiAaPQ)EBC1120882 035 $a(OCoLC)829253323 035 $a(EXLCZ)992670000000328200 100 $a20130225d2013 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aSystem-level modeling of MEMS /$fedited by Tamara Bechtold, Gabriele Schrag, and Lihong Feng 210 $aWeinheim $cWiley-VCH$d2013 215 $a1 online resource (564 p.) 225 0$aAdvanced micro & nanosystems 300 $aDescription based upon print version of record. 311 $a3-527-31903-4 320 $aIncludes bibliographical references and index. 327 $apt. I. Physical and mathematical fundamentals -- pt. II. Lumped element modeling method for MEMS devices -- pt. III. Mathematical model order reduction for MEMS devices -- pt. IV. Modeling of entire microsystems -- pt. V. Software implementations. 330 $aFilling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling employing, for example, model order reduction methods. By adopting this approach, the top editors and authors from industry and research have created a book that will set the standard for years to come. Writing on a clearly understandable and sufficiently detailed level, they familiarize reader 410 0$aAdvanced micro & nanosystems 606 $aMicroelectromechanical systems 615 0$aMicroelectromechanical systems. 676 $a621.381 701 $aBechtold$b T$g(Tamara)$01761912 701 $aSchrag$b Gabriele$01761913 701 $aFeng$b Lihong$01761914 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910877458803321 996 $aSystem-level modeling of MEMS$94201594 997 $aUNINA