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200 10$a17th IEEE International Conference on Micro Electro Mechanical Systems : Maastricht : MEMS 2004 technical digest : January 25-29, 2004
210 31$a[Place of publication not identified]$cIEEE$d2004
300   $aBibliographic Level Mode of Issuance: Monograph
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712 02$aInstitute of Electrical and Electronics Engineers
712 02$aIEEE Robotics and Automation Society
712 12$aIEEE International Conference on Micro Electro Mechanical Systems
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996   $a17th IEEE International Conference on Micro Electro Mechanical Systems : Maastricht : MEMS 2004 technical digest : January 25-29, 2004$92510877
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