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100   $a20160829d1995      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a1995 IEEE International Symposium on Semiconductor Manufacturing
210 31$a[Place of publication not identified]$cIEEE$d1995
215   $a1 online resource (350 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780329287 
311 08$a0780329287 
606   $aComputer integrated manufacturing systems$vCongresses
615  0$aComputer integrated manufacturing systems
676   $a670.285
712 02$aIEEE, Institute of Electrical and Electronics Engineers, Inc. Staff
801  0$bPQKB
906   $aBOOK
912   $a9910872974503321
996   $a1995 IEEE International Symposium on Semiconductor Manufacturing$92526056
997   $aUNINA