LEADER 01122oam 2200385zu 450 001 9910872932203321 005 20241212215157.0 035 $a(CKB)111085500349126 035 $a(SSID)ssj0000454883 035 $a(PQKBManifestationID)12194225 035 $a(PQKBTitleCode)TC0000454883 035 $a(PQKBWorkID)10398480 035 $a(PQKB)11349612 035 $a(NjHacI)99111085500349126 035 $a(EXLCZ)99111085500349126 100 $a20160829d2003 uy 101 0 $aeng 135 $aur||||||||||| 181 $ctxt 182 $cc 183 $acr 200 10$a14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop 210 31$a[Place of publication not identified]$cIEEE$d2003 215 $a1 online resource (330 pages) 300 $aBibliographic Level Mode of Issuance: Monograph 311 08$a9780780376731 311 08$a0780376730 606 $aProcess control$vCongresses 615 0$aProcess control 676 $a670.42 801 0$bPQKB 906 $aPROCEEDING 912 $a9910872932203321 996 $a14th Annual IEEE$92505572 997 $aUNINA