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200 10$a2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA
210 31$a[Place of publication not identified]$cAVS$d2002
300   $aBibliographic Level Mode of Issuance: Monograph
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606   $aSemiconductor wafers$xEffect of radiation on$vCongresses
606   $aSemiconductors$vCongresses
606   $aPlasma radiation$vCongresses
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615  0$aSemiconductor wafers$xEffect of radiation on
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615  0$aPlasma radiation
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702   $aGabriel$b Calvin T
702   $aEriguchi$b Koji
702   $aHook$b Terence
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712 02$aAmerican Vacuum Society
712 12$aInternational Symposium on Plasma Process-Induced Damage
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996   $a2002 7th International Symposium on Plasma- and Process-Induced Damage : June 5-7, 2002, Maui, Hawaii, USA$92501633
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