LEADER 02170oam 2200541zu 450 001 9910872861903321 005 20210807003355.0 035 $a(CKB)111026746717196 035 $a(SSID)ssj0000455341 035 $a(PQKBManifestationID)12130287 035 $a(PQKBTitleCode)TC0000455341 035 $a(PQKBWorkID)10399747 035 $a(PQKB)11469189 035 $a(EXLCZ)99111026746717196 100 $a20160829d1996 uy 101 0 $aeng 181 $ctxt 182 $cc 183 $acr 200 10$a1995 Japan IEMT Symposium : proceedings of 1995 International Electronic Manufacturing Technology Symposium : December 4-6, 1995, Omiya, Japan 210 31$a[Place of publication not identified]$cInstitute of Electrical and Electronics Engineers$d1996 300 $aBibliographic Level Mode of Issuance: Monograph 311 $a0-7803-3622-4 606 $aElectronic industries$xCongresses 606 $aElectronic apparatus and appliances$xDesign and construction$xCongresses 606 $aProduction engineering$xCongresses 606 $aMicroelectronics$xCongresses 606 $aThin films$xCongresses 606 $aElectrical & Computer Engineering$2HILCC 606 $aElectrical Engineering$2HILCC 606 $aEngineering & Applied Sciences$2HILCC 615 0$aElectronic industries$xCongresses 615 0$aElectronic apparatus and appliances$xDesign and construction$xCongresses 615 0$aProduction engineering$xCongresses 615 0$aMicroelectronics$xCongresses 615 0$aThin films$xCongresses 615 7$aElectrical & Computer Engineering 615 7$aElectrical Engineering 615 7$aEngineering & Applied Sciences 676 $a621.381 712 02$aComponents, Packaging & Manufacturing Technology Society 712 02$aIEEE Tokyo Section 712 12$aIEEE/CPMT International Electronic Manufacturing Technology Symposium 801 0$bPQKB 906 $aBOOK 912 $a9910872861903321 996 $a1995 Japan IEMT Symposium : proceedings of 1995 International Electronic Manufacturing Technology Symposium : December 4-6, 1995, Omiya, Japan$92510313 997 $aUNINA