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024 7 $a10.1109/ICIPRM.1998
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100   $a20160829d1998      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a1998 International Conference on Indium Phosphide and Related Materials
210 31$a[Place of publication not identified]$cIEEE$d1998
215   $a1 online resource (800 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780342200 
311 08$a0780342208 
330   $aThe papers included in this leading international conference examine test structures for microelectronic devices, their recent progress and future directions. Included is a detailed treatment of current developments in microelectronic test structure research, implementation, and applications. Also addressed are advances in device characterization, such as increased miniaturization, reduced operating voltages and reduced power requirements through improved measurement and test techniques. Topics highlighted include: Process Characterization, Dimensional Measurements, Interconnection, Material Characterization, Reliability, Device Characterization, and Statistics.
606   $aIndium phosphide$vCongresses
615  0$aIndium phosphide
676   $a621.38152
712 02$aIEEE, Institute of Electrical and Electronics Engineers, Inc. Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a9910872857603321
996   $a1998 International Conference on Indium Phosphide and Related Materials$92506463
997   $aUNINA