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200 10$a1997 International Symposium on Micro Mechatronics and Human Science
210 31$a[Place of publication not identified]$cI E E E$d1997
215   $a1 online resource (250 pages)
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606   $aMicroelectromechanical systems$vCongresses
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996   $a1997 International Symposium on Micro Mechatronics and Human Science$92525483
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