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100   $a20160829d1995      uy         0
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aIEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop $etheme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, MA, USA
210 31$aNew York :$cInstitute of Electrical and Electronics Engineers ;$d1995
215   $avi, 391 pages $cillustrations ;$d28 cm
300   $aBibliographic Level Mode of Issuance: Monograph
311 1 $a9780780327139 
311 1 $a0780327136 
606   $aSemiconductor industry$xCongresses
606   $aSemiconductors$xDesign and construction$xCongresses
606   $aProcess control$vCongresses
615  0$aSemiconductor industry$xCongresses.
615  0$aSemiconductors$xDesign and construction$xCongresses.
615  0$aProcess control
712 02$aInstitute of Electrical and Electronics Engineers,
712 02$aSemiconductor Equipment and Materials International,
712 12$aIEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.
801  0$bPQKB
906   $aBOOK
912   $a9910872797403321
996   $aIEEE$9878179
997   $aUNINA