LEADER 01990oam  2200517zu 450 
001 9910872737603321
005 20210807003447.0
035   $a(CKB)111026746711604
035   $a(SSID)ssj0000455360
035   $a(PQKBManifestationID)12166328
035   $a(PQKBTitleCode)TC0000455360
035   $a(PQKBWorkID)10399633
035   $a(PQKB)11143466
035   $a(EXLCZ)99111026746711604
100   $a20160829d1995      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 00$aIEEE micro electro mechanical systems : proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995
210 31$a[Place of publication not identified]$cInstitute of Electrical and Electronics Engineers$d1995
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-2503-6 
606   $aElectromechanical devices$xCongresses
606   $aMicroelectronics$xCongresses
606   $aDetectors$xCongresses
606   $aActuators$xCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aElectrical Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
615  0$aElectromechanical devices$xCongresses
615  0$aMicroelectronics$xCongresses
615  0$aDetectors$xCongresses
615  0$aActuators$xCongresses
615  7$aElectrical & Computer Engineering
615  7$aElectrical Engineering
615  7$aEngineering & Applied Sciences
712 02$aIEEE Robotics and Automation Society
712 02$aThe American Society of Mechanical Engineers
712 02$aAmerican Society of Mechanical Engineers Dynamic Systems and Control Division,
712 12$aIEEE Workshop on Micro Electro Mechanical Systems$f(1995 :$eAmsterdam, the Netherlands)
801  0$bPQKB
906   $aBOOK
912   $a9910872737603321
996   $aIEEE micro electro mechanical systems : proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995$92512190
997   $aUNINA