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100   $a20160829d2002      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2002 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
210 31$a[Place of publication not identified]$cI E E E$d2002
215   $a1 online resource (440 pages) $cillustrations
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780371583 
311 08$a0780371585 
320   $aIncludes bibliographical references.
606   $aSemiconductors
615  0$aSemiconductors.
676   $a621.3
712 02$aIEEE, Electron Devices Society Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a9910872701803321
996   $a2002 IEEE$92247189
997   $aUNINA