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101 0 $aeng
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181   $ctxt
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200 10$a13th Biennial University/Government/Industry Microelectronics Symposium, 1999
210 31$a[Place of publication not identified]$cIEEE$d1999
215   $a1 online resource (232 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780352407 
311 08$a0780352408 
330   $aUGIM'99 is the thirteenth in this series of biennial symposia that bring together educators and researchers to discuss educational and research activities related to microelectronics programs and other microfabrication technologies.
606   $aMicroelectronics$vCongresses
615  0$aMicroelectronics
676   $a621.381
712 02$aInstitute of Electrical and Electronics Engineers, Inc. Staff
801  0$bPQKB
906   $aPROCEEDING
912   $a9910872635503321
996   $a13th Biennial University$92528263
997   $aUNINA