LEADER 01802oam  2200481zu 450 
001 9910872546403321
005 20241212215318.0
035   $a(CKB)1000000000022308
035   $a(SSID)ssj0000396305
035   $a(PQKBManifestationID)12119841
035   $a(PQKBTitleCode)TC0000396305
035   $a(PQKBWorkID)10476318
035   $a(PQKB)11534183
035   $a(EXLCZ)991000000000022308
100   $a20160829d2004      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$a2004 Semiconductor Manufacturing Technology Workshop : date: September 9-10, 2004, location: the Ambassador Hotel-Hsinchu, Taiwan
210 31$a[Place of publication not identified]$cIEEE$d2004
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780384699 
311 08$a0780384695 
606   $aSemiconductors$xDesign and construction$vCongresses
606   $aElectronic industries$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aSemiconductors$xDesign and construction
615  0$aElectronic industries
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
712 02$aTaiwan Semiconductor Industry Association
712 02$aIEEE Electron Devices Society
712 02$aIEEE Electron Devices Society Taipei Chapter.
712 12$aSemiconductor Manufacturing Technology Workshop
801  0$bPQKB
906   $aPROCEEDING
912   $a9910872546403321
996   $a2004 Semiconductor Manufacturing Technology Workshop : date: September 9-10, 2004, location: the Ambassador Hotel-Hsinchu, Taiwan$92545456
997   $aUNINA