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200 10$a2000 IEEE/LEOS International Conference on Optical MEMS : Sheraton Kauai, Resort, Kauai, Hawaii, 21-24 August, 2000
210 31$a[Place of publication not identified]$cIEEE$d2000
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780362574 
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606   $aMicroelectromechanical systems$vCongresses
606   $aOptoelectronic devices$vCongresses
606   $aOptical MEMS$vCongresses
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606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aMicroelectromechanical systems
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615  0$aOptical MEMS
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
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712 02$aLasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)
712 02$aOptical Society of America
712 12$aInternational Conference on Optical MEMS
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996   $a2000 IEEE$92353420
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