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200 10$a2003 IEEE/LEOS International Conference on Optical MEMs : 18-21 August, 2003, Waikoloa Beach Marroitt an Outrigger Resort, Waikoloa, Hawaii
210 31$a[Place of publication not identified]$cIEEE$d2003
300   $aBibliographic Level Mode of Issuance: Monograph
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615  0$aOptical MEMS
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615  7$aEngineering & Applied Sciences
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712 02$aLasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)
712 12$aInternational Conference on Optical MEMS
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