LEADER 01428oam  2200421zu 450 
001 9910872411403321
005 20241212214841.0
035   $a(CKB)111026746719454
035   $a(SSID)ssj0000455174
035   $a(PQKBManifestationID)12192165
035   $a(PQKBTitleCode)TC0000455174
035   $a(PQKBWorkID)10399667
035   $a(PQKB)10601428
035   $a(NjHacI)99111026746719454
035   $a(EXLCZ)99111026746719454
100   $a20160829d1997      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a1997 IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop
210 31$a[Place of publication not identified]$cIEEE$d1997
215   $a1 online resource (480 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780340503 
311 08$a0780340507 
330   $aThe ASMC '97 proceedings contain premier papers on the latest advances in semiconductor manufacturing for IC manufacturing professionals. The number of papers presented has been on the incline over the past five years.
606   $aProcess control$vCongresses
606   $aSemiconductor industry$vCongresses
615  0$aProcess control
615  0$aSemiconductor industry
676   $a658.562
801  0$bPQKB
906   $aBOOK
912   $a9910872411403321
996   $a1997 IEEE$92494649
997   $aUNINA