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100   $a20160829d1992      uy 
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aIEEE Micro Electro Mechanical Systems, 1992
210 31$a[Place of publication not identified]$cIEEE$d1992
300   $aBibliographic Level Mode of Issuance: Monograph
311 08$a9780780304970 
311 08$a0780304977 
676   $a620.4
701  0$aBenecke$b W$g(Wolfgang)$01232096
701  0$aPetzold$b H.-C$g(Hans-Christian)$01232097
712 02$aIEEE Robotics and Automation Society.
712 02$aInstitute of Electrical and Electronics Engineers.$bGerman Section.
712 12$aIEEE Workshop on Micro Electro Mechanical Systems$f(1992 :$eTravemu?nde, Lu?beck, Germany)
801  0$bPQKB
906   $aBOOK
912   $a9910872408103321
996   $aIEEE Micro Electro Mechanical Systems, 1992$92860786
997   $aUNINA