LEADER 01703nam  2200565Ia 450 
001 9910841421503321
005 20230721033147.0
010   $a1-281-94693-1
010   $a9786611946937
010   $a3-527-62213-6
010   $a3-527-62256-X
035   $a(CKB)1000000000551372
035   $a(EBL)3460105
035   $a(SSID)ssj0000235367
035   $a(PQKBManifestationID)11176146
035   $a(PQKBTitleCode)TC0000235367
035   $a(PQKBWorkID)10260862
035   $a(PQKB)11121884
035   $a(MiAaPQ)EBC3460105
035   $a(OCoLC)264717029
035   $a(EXLCZ)991000000000551372
100   $a20080822d2008      uy         0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aReliability of MEMS$b[electronic resource] /$fedited by Osamu Tabata and Toshiyuki Tsuchiya
205   $a11th ed.
210   $aWeinheim $cWiley-VCH$dc2008
215   $a1 online resource (0 p.)
225 1 $aAdvanced micro & nanosystems ;$vv.6
300   $a"Testing of materials and devices".
311   $a3-527-31494-6 
320   $aIncludes bibliographical references and index.
410  0$aAdvanced micro & nanosystems ;$vv.6.
606   $aMicroelectromechanical systems$xReliability
606   $aElectrical engineering
615  0$aMicroelectromechanical systems$xReliability.
615  0$aElectrical engineering.
676   $a615.7
701   $aTsuchiya$b Toshiyuki$01667640
701   $aTabata$b Osamu$f1956-$0892953
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910841421503321
996   $aReliability of MEMS$94027600
997   $aUNINA