LEADER 05216nam 2200625Ia 450 001 9910840502503321 005 20230617021421.0 010 $a1-280-55863-6 010 $a9786610558636 010 $a3-527-60636-X 010 $a3-527-60165-1 035 $a(CKB)1000000000019379 035 $a(EBL)481512 035 $a(SSID)ssj0000303234 035 $a(PQKBManifestationID)11265541 035 $a(PQKBTitleCode)TC0000303234 035 $a(PQKBWorkID)10275290 035 $a(PQKB)10187079 035 $a(MiAaPQ)EBC481512 035 $a(OCoLC)85820018 035 $a(EXLCZ)991000000000019379 100 $a20040218d2004 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aMicrosystem engineering of lab-on-a-chip devices /$f[editors], Oliver Geschke, Henning Klank, Pieter Tellemann 210 $aWeinheim $cWiley-VCH$dc2004 215 $a1 online resource (272 p.) 300 $aDescription based upon print version of record. 311 $a3-527-30733-8 320 $aIncludes bibliographical references and index. 327 $aMicrosystem Engineering of Lab-on-a-chip Devices; Contents; Preface; 1 Introduction; 1.1 Learning from the Experiences of Microelectronics; 1.2 The Advantages of Miniaturizing Systems for Chemical Analysis; 1.3 From Concept to ?TAS; 1.4 References; 2 Clean Rooms; 3 Microfluidics - Theoretical Aspects; 3.1 Fluids and Flows; 3.2 Transport Processes; 3.2.1 Types of Transport; 3.2.1.1 Convection; 3.2.1.2 Migration; 3.2.1.3 Diffusion; 3.2.1.4 Dispersion; 3.3 System Design; 3.3.1 Laminar Flow and Diffusion in Action; 3.4 An Application: Biological Fluids; 3.5 References 327 $a4 Microfluidics - Components4.1 Valves and Pumps; 4.1.1 Moving Liquids by Electroosmosis; 4.1.2 Mixers; 4.2 Injecting, Dosing, and Metering; 4.3 Temperature Measurement in Microfluidic Systems; 4.3.1 Microreactors; 4.3.2 Temperature Sensors for Microsystems; 4.3.3 Resistance Temperature Detectors; 4.3.3.1 Metals; 4.3.3.2 Nonmetals; 4.3.4 Thermocouples; 4.3.5 Semiconductor Junction Sensors; 4.3.6 Temperature Sensors Built on Other Principles; 4.3.7 Conclusion; 4.4 Optical Sensors; 4.4.1 Instrumentation; 4.4.2 Absorption Detection; 4.4.3 Evanescent-wave Sensing; 4.4.4 Fluorescence Detection 327 $a4.5 Electrochemical Sensors4.6 References; 5 Simulations in Microfluidics; 5.1 Physical Aspects and Design; 5.2 Choosing Software and Hardware; 5.2.1 CFD-ACE+Version 6.6; 5.2.2 CoventorWareTM Version 2001.3; 5.2.3 Hardware; 5.2.4 The Core Elements of Typical CFD Software; 5.2.5 Pre-processors; 5.2.6 Solvers; 5.2.7 Post-processors; 5.3 Important Numerical Settings; 5.3.1 Boundary Conditions; 5.3.2 Solver Settings; 5.4 Errors and Uncertainties; 5.5 Interpretation and Evaluation of Simulations; 5.6 Example Simulations; 5.6.1 Fully-developed Flow in a Circular Capillary 327 $a5.6.2 Movement of a Chemical Plug by Electroosmotic Flow in a Detection Cell5.6.3 Conclusions; 5.7 References; 6 Silicon and Cleanroom Processing; 6.1 Substrate Fabrication; 6.2 Optical Lithography; 6.2.1 Photolithography; 6.2.2 Mask Design; 6.2.3 Hints in Planning Fabrication Runs; 6.3 Deposition; 6.3.1 Fundamentals of Coatings; 6.3.2 Deposition Methods; 6.3.3 Materials; 6.3.4 Lift-off; 6.3.5 Silicides; 6.4 Etching Removal; 6.4.1 Wet-etching Fundamentals; 6.4.2 Etching with HF; 6.4.3 Isotropic Silicon Etch; 6.4.4 Orientation-dependent Silicon Etching 327 $a6.4.5 Common Orientation-dependent Etchants6.4.6 Other Etchants; 6.4.7 Effects of Not Stirring a Transport-limited Etch; 6.5 Dry Etching; 6.5.1 Plasma Etching Fundamentals; 6.5.2 Plasma Etching Setups; 6.5.3 Etch Gases; 6.5.4 Laser-assisted Etching; 6.6 Heat Treatment; 6.6.1 Thermal Oxidation; 6.6.2 Diffusion; 6.6.3 Annealing; 6.6.4 Wafer Bonding; 6.7 References; 7 Glass Micromachining; 7.1 Wet Chemical Etching; 7.2 Reactive Ion Etching (RIE) of Glass; 7.3 Laser Patterning; 7.4 Powder Blasting; 7.5 Glass Bonding; 7.6 A Microfabrication Example; 7.7 References; 8 Polymer Micromachining 327 $a8.1 Hot Embossing 330 $aWritten on a non-specialist level by an interdisciplinary team of chemists, biologists and engineers from one of Europe's leading centres for microsystem research, the Danish Mikroelektronik Centret (MIC), this is a concise practical introduction to the subject. As such, the book is the first to focus on analytical applications, providing life and analytical scientists, biotechnologists and pharmaceutists with an understanding of the principles behind the design and manufacture of chemical and biochemical microsystems. The text is backed by a chapter devoted to troubleshooting as well as a g 606 $aMicroelectronics 606 $aMicrotechnology 615 0$aMicroelectronics. 615 0$aMicrotechnology. 676 $a621.381 701 $aGeschke$b Oliver$0504981 701 $aKlank$b Henning$0504982 701 $aTelleman$b Pieter$0504983 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910840502503321 996 $aMicrosystem Engineering of Lab-on-a-chip Devices$9807259 997 $aUNINA