LEADER 01278nam 2200421 450 001 9910830993803321 005 20230809233528.0 010 $a3-527-69483-8 010 $a3-527-69481-1 010 $a3-527-69482-X 035 $a(CKB)4330000000010664 035 $a(MiAaPQ)EBC4826407 035 $a(EXLCZ)994330000000010664 100 $a20170404h20172017 uy 0 101 0 $aeng 135 $aurcnu|||||||| 181 $2rdacontent 182 $2rdamedia 183 $2rdacarrier 200 10$aAtomic layer deposition in energy conversion applications /$fJulien Bachmann 210 1$aWeinheim, Germany :$cWiley-VCH,$d2017. 210 4$dİ2017 215 $a1 online resource (311 pages) $cillustrations, graphs 311 $a3-527-33912-4 320 $aIncludes bibliographical references at the end of each chapters and index. 606 $aEnergy conversion 606 $aAtomic layer deposition 615 0$aEnergy conversion. 615 0$aAtomic layer deposition. 676 $a621.042 700 $aBachmann$b Julien$01716257 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910830993803321 996 $aAtomic layer deposition in energy conversion applications$94111475 997 $aUNINA