LEADER 01493nam  2200469   450 
001 9910830417603321
005 20161213103920.0
010   $a1-118-71797-X
035   $a(CKB)4330000000006896
035   $a(MiAaPQ)EBC4721144
035   $a(DLC)  2015032319
035   $a(EXLCZ)994330000000006896
100   $a20161104h20172017  uy             0
101 0 $aeng
135   $aurcnu||||||||
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 00$aMeasurement technology for micro-nanometer devices /$fWendong Zhang [and eight others]
210  1$aSingapore :$cWiley :$cNational Defense Industry Press,$d2017.
210  4$dİ2017
215   $a1 online resource (344 pages)
311   $a1-118-71798-8 
311   $a1-118-71796-1 
320   $aIncludes bibliographical references at the end of each chapters and index.
606   $aMicrotechnology$xMeasurement
606   $aNanotechnology$xMeasurement
606   $aMicroelectromechanical systems$xTesting
606   $aPhysical measurements
615  0$aMicrotechnology$xMeasurement.
615  0$aNanotechnology$xMeasurement.
615  0$aMicroelectromechanical systems$xTesting.
615  0$aPhysical measurements.
676   $a681/.2
702   $aZhang$b Wendong
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910830417603321
996   $aMeasurement technology for micro-nanometer devices$93916370
997   $aUNINA