LEADER 05209nam 2200625Ia 450 001 9910830321103321 005 20230803024745.0 010 $a1-299-47599-X 010 $a3-527-66437-8 010 $a3-527-66434-3 010 $a3-527-66435-1 035 $a(CKB)2670000000263091 035 $a(EBL)1037093 035 $a(OCoLC)816311244 035 $a(SSID)ssj0000776680 035 $a(PQKBManifestationID)11513830 035 $a(PQKBTitleCode)TC0000776680 035 $a(PQKBWorkID)10746454 035 $a(PQKB)11548699 035 $a(MiAaPQ)EBC1037093 035 $a(EXLCZ)992670000000263091 100 $a20121016d2013 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 12$aA practical guide to optical metrology for thin films$b[electronic resource] /$fMichael Quinten 210 $aWeinheim $cWiley-VCH$dc2013 215 $a1 online resource (225 p.) 300 $aDescription based upon print version of record. 311 $a3-527-41167-4 320 $aIncludes bibliographical references (p. 201-208) and index. 327 $aA Practical Guide to Optical Metrology for Thin Films; Contents; Preface; 1 Introduction; 2 Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.5.1 Transmission Gratings; 2.5.1.1 Lamellar Transmission Gratings; 2.5.1.2 Holographic Transmission Gratings; 2.5.2 Reflection Gratings; 2.5.2.1 Lamellar Reflection Gratings; 2.5.2.2 Blazed Gratings; 2.5.2.3 Holographic Gratings; 2.6 Scattering 327 $a2.7 Dielectric Function and Refractive Index2.7.1 Models for the Dielectric Function; 2.7.2 Kramers-Kronig Analysis of Dielectric Functions; 2.7.3 Empiric Formulas for the Refractive Index; 2.7.4 EMA Models; 3 Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.1.1 Coherent Superposition of Reflected Light; 3.1.2 Influence of Absorption on the Layer; 3.1.3 Partial Incoherence due to Thick Substrates; 3.1.4 Partial Incoherence due to Roughness; 3.1.5 Coherent Superposition of Transmitted Light 327 $a3.2 Propagating Wave Model for a Layer Stack3.2.1 Coherent Reflectance and Transmittance of a Layer Stack; 3.2.2 Consideration of Incoherent Substrates; 3.2.3 Consideration of Surface Roughness; 3.2.4 r-t-ø Model for a Layer Stack; 4 The Optical Measurement; 4.1 Spectral Reflectance and Transmittance Measurement; 4.2 Ellipsometric Measurement; 4.3 Other Optical Methods; 4.3.1 Prism Coupling; 4.3.2 Chromatic Thickness Determination; 4.4 Components for the Optical Measurement; 4.4.1 Light Sources; 4.4.1.1 Halogen Lamps; 4.4.1.2 White Light LED; 4.4.1.3 Superluminescence Diodes 327 $a4.4.1.4 Xenon High-Pressure Arc Lamps4.4.1.5 Deuterium Lamps; 4.4.2 Optical Components; 4.4.2.1 Lenses and Mirrors; 4.4.2.2 Polarizers and Analyzers; 4.4.2.3 Optical Retarders; 4.4.3 Optical Fibers; 4.4.4 Miniaturized Spectrometers; 4.4.4.1 Gratings; 4.4.4.2 Detectors; 4.4.4.3 System Properties; 5 Thin-Film Thickness Determination; 5.1 Fast Fourier Transform; 5.1.1 Single Layer; 5.1.2 Layer Stack; 5.1.3 Accuracy, Resolution, Repeatability, and Reproducibility; 5.2 Regression Analysis with ?2-Test; 5.2.1 Method of Thickness Determination 327 $a5.2.2 Accuracy, Resolution, Repeatability, and Reproducibility6 The Color of Thin Films; 7 Applications; 7.1 High-Reflection and Antireflection Coatings; 7.1.1 HR Coatings on Metallic Mirrors; 7.1.2 AR Coatings on Glass; 7.1.3 AR Coatings on Solar Wafers; 7.2 Thin Single- and Double-Layer Coatings; 7.2.1 SiO2 on Silicon Wafers; 7.2.2 Si3N4 Hardcoat; 7.2.3 Double-Layer System; 7.2.4 Porous Silicon on Silicon; 7.3 Photoresists and Photolithographic Structuring; 7.4 Thickness of Wafers and Transparent Plastic Films; 7.4.1 Thickness of Semiconductor, Glass, and Sapphire Wafers 327 $a7.4.2 Thickness of Transparent Plastic Films 330 $a A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light a 606 $aThin films$xOptical properties 606 $aThin films$xMeasurement 606 $aOptical measurements 615 0$aThin films$xOptical properties. 615 0$aThin films$xMeasurement. 615 0$aOptical measurements. 676 $a530.42750287 700 $aQuinten$b Michael$021849 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910830321103321 996 $aA practical guide to optical metrology for thin films$94076330 997 $aUNINA