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101 0 $aeng
181   $ctxt
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183   $acr
200 10$aMicrosensors, MEMS, and Smart Devices
210 31$a[Place of publication not identified]$cJohn Wiley & Sons Incorporated$d2001
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-470-85219-4 
311   $a0-471-86109-X 
606   $aEngineering$xElectronics
615  4$aEngineering$xElectronics
676   $a621.381
700   $aGardner$b Julian W$08963
702   $aAwadelkarim$b Osama O
702   $aVaradan$b Vijay K
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906   $aBOOK
912   $a9910830001003321
996   $aMicrosensors, MEMS, and smart devices$91092723
997   $aUNINA