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100   $a20080822d2008      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aReliability of MEMS$b[electronic resource] /$fedited by Osamu Tabata and Toshiyuki Tsuchiya
205   $a11th ed.
210   $aWeinheim $cWiley-VCH$dc2008
215   $a1 online resource (0 p.)
225 1 $aAdvanced micro & nanosystems ;$vv.6
300   $a"Testing of materials and devices".
311   $a3-527-31494-6 
320   $aIncludes bibliographical references and index.
410  0$aAdvanced micro & nanosystems ;$vv.6.
606   $aMicroelectromechanical systems$xReliability
606   $aElectrical engineering
615  0$aMicroelectromechanical systems$xReliability.
615  0$aElectrical engineering.
676   $a615.7
701   $aTsuchiya$b Toshiyuki$01667640
701   $aTabata$b Osamu$f1956-$0892953
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910829996103321
996   $aReliability of MEMS$94027600
997   $aUNINA

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