LEADER 05275nam 2200613 a 450 001 9910829968703321 005 20230721003730.0 010 $a1-281-83143-3 010 $a9786611831431 010 $a0-470-03407-6 010 $a0-470-03408-4 035 $a(CKB)1000000000556337 035 $a(EBL)366759 035 $a(OCoLC)437234382 035 $a(SSID)ssj0000241529 035 $a(PQKBManifestationID)11219025 035 $a(PQKBTitleCode)TC0000241529 035 $a(PQKBWorkID)10297304 035 $a(PQKB)10306991 035 $a(MiAaPQ)EBC366759 035 $a(EXLCZ)991000000000556337 100 $a20070910d2007 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aScaling issues and design of MEMS$b[electronic resource] /$fSalvatore Baglio, Salvatore Castorina, Nicolo? Savalli 210 $aChichester, West Sussex, England ;$aHoboken, NJ $cJohn Wiley & Sons$dc2007 215 $a1 online resource (245 p.) 300 $aDescription based upon print version of record. 311 $a0-470-01699-X 320 $aIncludes bibliographical references and index. 327 $aScaling Issues and Design of MEMS; Contents; Preface; Introduction; 1 Scaling of MEMS; 1.1 Introduction to Scaling Issues; 1.2 Examples of Dimensional Scaling Potentials; 1.2.1 Scaling effects on a cantilever beam; 1.2.2 Scaling of electrostatic actuators; 1.2.3 Scaling of thermal actuators; 1.3 Motivation, Fabrication and Scaling of MEMS; 1.4 Scaling as a Methodological Approach; References; 2 Scaling of Microactuators - an Overview; 2.1 Electrostatic Actuators; 2.1.1 Transverse combs modelling; 2.1.2 Lateral combs modelling; 2.2 Magnetic Transducers; 2.2.1 Magnetic actuators 327 $a2.2.2 Ferromagnetic transducers2.3 Thermal Actuators; 2.3.1 Thermomechanical actuators; Acknowledgements; References; 3 Scaling of Thermal Sensors; 3.1 Thermoelectric Sensors; 3.2 Application: Dew-Point Relative Humidity Sensors; 3.2.1 Device structures and operating principles; 3.2.2 Device modelling and simulations; 3.2.3 Device design; 3.3 Conclusions; Acknowledgements; References; 4 Inductive Sensors for Magnetic Fields; 4.1 Inductive Microsensors for Magnetic Particles; 4.1.1 Integrated inductive sensors; 4.1.2 Planar differential transformer; 4.1.3 Signal-conditioning circuits 327 $a4.1.4 Simulation of the planar differential transformer4.1.5 Experimental results; 4.2 Magnetic Immunoassay Systems; Acknowledgements; References; 5 Scaling of Mechanical Sensors; 5.1 Introduction; 5.2 Device Modelling and Fabrication Processes; 5.2.1 Fabrication processes; 5.2.2 Devices modelling; 5.2.3 Accelerometers; 5.2.4 Resonant mass sensors; 5.3 Experimental Device Prototypes; 5.3.1 CMOS devices; 5.3.2 SOI devices; 5.3.3 Finite element modelling; 5.4 Scaling Issues on Microaccelerometers and Mass Sensors; 5.5 Some Experimental Results; 5.6 Vibrating Microgyroscopes 327 $a5.6.1 Coupled vibratory gyroscopesAcknowledgements; References; 6 Scaling of Energy Sources; 6.1 Introduction; 6.2 Energy Supply Strategies for Autonomous Microsystems; 6.2.1 Use of microlenses in photothermomechanical actuation; 6.2.2 Technologies, materials and design of photothermomechanical actuators; 6.3 Photothermomechanical and Photothermoelectric Strategies for Highly Efficient Power Supply of Autonomous Microsystems; 6.3.1 Photothermoelectric power generation; 6.4 Efficiency of the Combined Energy Supply Strategy; References 327 $a7 Technologies and Architectures for Autonomous MEMS Microrobots7.1 Design Issues in Microrobots; 7.2 A Microrobot Architecture Based on Photothermal Strategy; 7.3 A Microrobot as a Paradigm for the Analysis of Scaling in Microsystems; References; 8 Moving towards the Nanoscale; 8.1 Semiconductor-Based Nano-Electromechanical Systems; 8.2 Nanofabrication Facilities; 8.3 Overview of Nanosensors; 8.3.1 Use of AFM for materials and nanodevices characterization; 8.3.2 Scanning thermal microscopy (SThM); 8.3.3 Scanning Hall probe microscopy 327 $a8.3.4 Mechanical resonant immunospecific biological detector 330 $aThis accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including: temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) t 606 $aMicroelectromechanical systems$xDesign and construction 615 0$aMicroelectromechanical systems$xDesign and construction. 676 $a620/.5 676 $a621.381 700 $aBaglio$b S$g(Salvatore)$01615371 701 $aCastorina$b Salvatore$0501480 701 $aSavalli$b Nicolo?$01615372 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910829968703321 996 $aScaling issues and design of MEMS$93945533 997 $aUNINA