LEADER 03924nam 22006131 450 001 9910828569503321 005 20240405124825.0 010 $a3-908158-89-3 035 $a(CKB)3710000000025529 035 $a(EBL)1872935 035 $a(SSID)ssj0001189914 035 $a(PQKBManifestationID)11652826 035 $a(PQKBTitleCode)TC0001189914 035 $a(PQKBWorkID)11178998 035 $a(PQKB)10942301 035 $a(Au-PeEL)EBL1872935 035 $a(CaPaEBR)ebr10777869 035 $a(OCoLC)897641110 035 $a(MiAaPQ)EBC1872935 035 $a(EXLCZ)993710000000025529 100 $a20130228d2013 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aNext generation micro/nano systems $eselected, peer reviewed papers from the Symposium E "Next Generation Micro/Nano Systems" of CIMTEC 2012 - 4th International Conference "Smart materials, Structures and Systems", held in Montecatini Terme, Italy, June 10-14, 2012 /$fedited by Pietro Vincenzini, Leandro Lorenzelli 205 $a1st ed. 210 1$aDurnten-Zurich :$cTrans Tech Publications Ltd,$d[2013] 210 4$dİ2013 215 $a1 online resource (118 p.) 225 0$aAdvances in science and technology,$x1662-0356 ;$vv. 81 300 $aDescription based upon print version of record. 311 $a3-908158-67-2 320 $aIncludes bibliographical references and indexes. 327 $aNext Generation Micro/Nano Systems; Preface and Committees; Table of Contents; Chapter 1: Physical, Chemical and Optical MEMS; History and Recent Progress of MEMS Physical Sensors; Continuous Process for Large-Area Flexible MEMS; Novel Plasmonic Bio-Sensing System Based on Two-Dimensional Gold Patch Arrays for Linear and Nonlinear Regimes; Micromachined Devices for Use in Terahertz Applications; Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon; Wet-Etching Characteristics of SiCN Films Deposited by HWCVD Method 327 $aModeling of Piezo-Actuated Stick-Slip Micro-Drives: An OverviewForeign Bodies - The Creation of Symbiotic Jewellery through the Development and Application of Stimulus-Responsive Smart Materials and Microelectromechanical Systems; Chapter 2: Radiofrequency MEMS; Integrated Microsystems; RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems; Functional RF Devices Powered by MEMS Technologies; Chapter 3: Micro(Nano) Fluidics; Microfluidic Microchemomechanical Systems; Hydrogel-Based Microfluidic Systems 327 $aSuper-Hydrophilic PDMS and PET Surfaces for Microfluidic DevicesNew Viscosity Data for CuO-Water Nanofluid - The Hysteresis Phenomenon Revisited; Keywords Index; Authors Index 330 $aThe 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on ""Next Generation Micro/Nano Systems"". The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/Nano Fluidics. Review from Book News Inc.: Once again the conference was broken down into 10 symposia and several focused and special sessions so the 800 papers had a little elbow room. The symposium documented here covered physical, chemical, and optical micro-electro-mechanical systems (MEMS); radiofrequency MEMS; and 410 0$aAdvances in Science and Technology 606 $aSmart materials$vCongresses 606 $aSmart structures$vCongresses 615 0$aSmart materials 615 0$aSmart structures 676 $a620.19 701 $aVincenzini$b P.$f1939-$019040 701 $aLorenzelli$b Leandro$01654446 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910828569503321 996 $aNext generation micro$94006291 997 $aUNINA