LEADER 02677nam  2200589Ia 450 
001 9910824276603321
005 20200520144314.0
010   $a1-60783-978-4
035   $a(CKB)2550000000012446
035   $a(EBL)583647
035   $a(OCoLC)659579814
035   $a(SSID)ssj0000410915
035   $a(PQKBManifestationID)11260756
035   $a(PQKBTitleCode)TC0000410915
035   $a(PQKBWorkID)10353699
035   $a(PQKB)11213597
035   $a(Au-PeEL)EBL583647
035   $a(CaPaEBR)ebr10393281
035   $a(CaBNVSL)mat09100728
035   $a(IEEE)9100728
035   $a(MiAaPQ)EBC583647
035   $a(EXLCZ)992550000000012446
100   $a20100317d2010      uy         0
101 0 $aeng
135   $aurcn|||||||||
181   $ctxt
182   $cc
183   $acr
200 10$aFBAR, MEMS and NEMS resonator design and applications /$fHumberto Campanella
205   $a1st ed.
210   $aBoston $cArtech House$dc2010
215   $a1 online resource (363 p.)
225 1 $aIntegrated microsystems series
300   $aIncludes index.
311   $a1-60783-977-6 
320   $aIncludes bibliographical references and index.
327   $a1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
330   $aThis groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.
410  0$aArtech House integrated microsystems series.
606   $aAcoustic surface wave devices
606   $aElectric resonators
615  0$aAcoustic surface wave devices.
615  0$aElectric resonators.
676   $a621.381
700   $aCampanella$b Humberto$01645514
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910824276603321
996   $aFBAR, MEMS and NEMS resonator design and applications$94202728
997   $aUNINA