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100   $a20171006h20102010  uy             0
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135   $aurcnu||||||||
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aAtomlagenabscheidung von hafniumoxid /$fThomas Zilbauer
205   $a1. Auflage.
210  1$aGo?ttingen, [Germany] :$cCuvillier Verlag,$d2010.
210  4$dİ2010
215   $a1 online resource (152 pages) $cillustrations (some color)
311   $a3-86955-270-0 
320   $aIncludes bibliographical references.
606   $aChemical vapor deposition
606   $aAtomic layer deposition
606   $aHafnium oxide
615  0$aChemical vapor deposition.
615  0$aAtomic layer deposition.
615  0$aHafnium oxide.
676   $a660.04
700   $aZilbauer$b Thomas$01678888
801  0$bMiAaPQ
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906   $aBOOK
912   $a9910822746903321
996   $aAtomlagenabscheidung von hafniumoxid$94046802
997   $aUNINA