LEADER 05490nam 2200709Ia 450 001 9910822266303321 005 20240416131422.0 010 $a1-281-05935-8 010 $a9786611059354 010 $a0-08-053375-2 035 $a(CKB)1000000000384997 035 $a(EBL)318318 035 $a(OCoLC)476112974 035 $a(SSID)ssj0000168527 035 $a(PQKBManifestationID)12011124 035 $a(PQKBTitleCode)TC0000168527 035 $a(PQKBWorkID)10193180 035 $a(PQKB)10400900 035 $a(Au-PeEL)EBL318318 035 $a(CaPaEBR)ebr10201808 035 $a(CaONFJC)MIL105935 035 $a(OCoLC)437191721 035 $a(MiAaPQ)EBC318318 035 $a(PPN)178929263 035 $a(EXLCZ)991000000000384997 100 $a19970619d1998 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aHandbook of vacuum science and technology /$fedited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III 205 $a1st ed. 210 $aSan Diego, CA $cAcademic Press$dc1998 215 $a1 online resource (861 p.) 300 $aDescription based upon print version of record. 311 $a0-12-352065-7 320 $aIncludes bibliographical references and index. 327 $aFront Cover; HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY; Copyright Page; Contents; Preface; List of Contributors; Part 1: Fundamentals of Vacuum Technology and Surface Physics; Chapter 1.1. Vacuum Nomenclature and Definitions; 1.1.1 Basic Definition; 1.1.2 Pressure Regions of Vacuum; Chapter 1.2. Gas Properties; 1.2.1 Description of Vacuum as a Low-Pressure Gas; 1.2.2 Characteristics of a Gas-Basic Definitions; 1.2.3 Gas Laws; Chapter 1.3. Molecular Processes and Kinetic Theory; 1.3.1 General Description; 1.3.2 Molecular Motion; 1.3.3 Kinetic Theory Derivation of the Gas Laws; 1.3.4 Pressure 327 $a1.3.5 Molecular Mean Free Path1.3.6 Number of Impacts with the Chamber Wall; 1.3.7 Time to Form a Monolayer; 1.3.8 Thermal Transpiration; 1.3.9 Coefficient of Thermal Conductivity; 1.3.10 Coefficient of Diffusion; Chapter 1.4. Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate; Chapter 1.5. Gas Flow; 1.5.1 Nature of Gas Flow; 1.5.2 Turbulent Flow; 1.5.3 Viscous, Streamline, or Laminar Flow; 1.5.4 Molecular Flow; 1.5.5 Flow Relationships; Chapter 1.6. Conductance; 1.6.1 Conductance; 1.6.2 Conductances in Parallel; 1.6.3 Conductances in Series 327 $aChapter 1.7. Flow Calculations1.7.1 Equations for Viscous Flow; 1.7.2 Equations for Molecular Flow; 1.7.3 Knudsen's Formulation; 1.7.4 Clausing Factors; Chapter 1.8. Surface Physics and Its Relation to Vacuum Science; 1.8.1 Physical Adsorption or ""Adsorption""; 1.8.2 Chemisorption; 1.8.3 Sticking Coefficient; 1.8.4 Surface Area; 1.8.5 Surface Adsorption Isotherms; 1.8.6 Capillary Action; 1.8.7 Condensation; 1.8.8 Desorption Phenomena; 1.8.9 Thermal Desorption; 1.8.10 Photoactivation; 1.8.11 Ultrasonic Desorption; 1.8.12 Electron- and Ion-Stimulated Desorption 327 $a1.8.13 Gas Release from SurfacesReferences; Part 2: Creation of Vacuum; Chapter 2.1. Technology of Vacuum Pumps - An Overview; 2.1.1 Vacuum Pump Function Basics; 2.1.2 Gas Transport: Throughput; 2.1.3 Performance Parameters; 2.1.4 Pumping Speed; 2.1.5 Pumpdown Time; 2.1.6 Ultimate Pressure; 2.1.7 Forevacuum and High-Vacuum Pumping; 2.1.8 Pump System Relationships; 2.1.9 Crossover from Rough to High-Vacuum Pumps; 2.1.10 Pumping System Design; References; Chapter 2.2. Diaphragm Pumps; 2.2.1 Introduction: Basics and Operating Principle; 2.2.2 State-of-the-Art Design and Manufacturing 327 $a2.2.3 Performance and Technical Data2.2.4 Modular Concept for Specific Application Setups: Standalone Operation; 2.2.5 Diaphragm Pumps as Backing and Auxiliary Pumps in Vacuum Systems; References; Chapter 2.3. Vacuum Blowers; 2.3.1 Introduction; 2.3.2 Equipment Description; 2.3.3 Blower Operating Principle; 2.3.4 Blower Pumping Efficiency; 2.3.5 Blower Pumping Speed Calculations; 2.3.6 Power Requirements; 2.3.7 Temperature Considerations; 2.3.8 Flow and Compression Ratio Control Mechanisms; 2.3.9 Liquid-Sealed Blowers; 2.3.10 Selected System Arrangements 327 $aChapter 2.4. Vacuum Jet Pumps (Diffusion Pumps) 330 $aThe Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner.Key Features* User oriented with man 606 $aVacuum technology$vHandbooks, manuals, etc 606 $aMechanical engineering 615 0$aVacuum technology 615 0$aMechanical engineering. 676 $a621.5/5 21 676 $a621.55 676 $a621.55 701 $aHoffman$b Dorothy M.$fd. 1996.$01611565 701 $aSingh$b Bawa$01560642 701 $aThomas$b John H$0347489 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910822266303321 996 $aHandbook of vacuum science and technology$93939892 997 $aUNINA