LEADER 05685nam 2200793 450 001 9910820975703321 005 20230807212357.0 010 $a1-118-83154-3 010 $a1-118-83157-8 010 $a1-118-83155-1 035 $a(CKB)3710000000335298 035 $a(EBL)1895640 035 $a(SSID)ssj0001402631 035 $a(PQKBManifestationID)11833629 035 $a(PQKBTitleCode)TC0001402631 035 $a(PQKBWorkID)11357890 035 $a(PQKB)10326046 035 $a(MiAaPQ)EBC1895640 035 $a(DLC) 2014046325 035 $a(Au-PeEL)EBL1895640 035 $a(CaPaEBR)ebr11017934 035 $a(CaONFJC)MIL726288 035 $a(OCoLC)897001894 035 $a(EXLCZ)993710000000335298 100 $a20150310h20152015 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aParticle adhesion and removal /$fedited by K. L. Mittal and Ravi Jaiswal 210 1$aHoboken, New Jersey :$cScrivener Publishing,$d2015. 210 4$dİ2015 215 $a1 online resource (936 p.) 225 0 $aAdhesion and Adhesives : Fundamental and Applied Aspects 300 $aDescription based upon print version of record. 311 $a1-322-95006-7 311 $a1-118-83153-5 320 $aIncludes bibliographical references and index. 327 $aCover; Half Title page; Title page; Copyright page; Preface; Acknowledgements; Part 1: Particle Adhesion: Fundamentals; Chapter 1: Fundamental Forces in Particle Adhesion; 1.1 Introduction; 1.2 Various Forces in Particle Adhesion; 1.3 Summary; References; Chapter 2: Mechanics of Particle Adhesion and Removal; 2.1 Introduction; 2.2 Models; 2.3 Simulations Results; 2.4 Summary and Conclusions; Acknowledgements; References; Chapter 3: Microscopic Particle Contact Adhesion Models and Macroscopic Behavior of Surface Modified Particles; 3.1 Introduction; 3.2 Constitutive Contact Models 327 $a3.3 Macroscopic Powder Behavior - Continuum Mechanics Approach3.4 Surface Modification to Alter the Adhesion Properties; 3.5 Experimental Measurements of the Adhesion Forces; 3.6 Summary and Conclusions; Acknowledgements; List of Symbols; References; Chapter 4: Characterization of Single Particle Adhesion: A Review of Recent Progress; 4.1 Introduction; 4.2 Background; 4.3 Recent Developments; 4.4 Conclusions and Remarks; Acknowledgments; List of Symbols; References; Part 2: Particle Removal Techniques; Chapter 5: High Intensity Ultrasonic Cleaning for Particle Removal; 5.1 Introduction 327 $a5.2 Ultrasound and Ultrasonics5.3 Cavitation Phenomenon; 5.4 Generation of Ultrasound - Transducers; 5.5 Ultrasonic Generators; 5.6 Principles of Ultrasonic Cleaning for Particle Removal; 5.7 Determination of Residual Particles on Surfaces; 5.8 Ultrasonic Aqueous Cleaning Equipment and Process; 5.9 Precision Cleaning; 5.10 Contaminants; 5.11 Ultrasonic Cavitation Forces and Surface Cleaning; 5.12 Cleaning Chemistry; 5.13 Mechanism of Cleaning; 5.14 Cavitation Erosion; 5.15 Summary; References; Chapter 6: Megasonic Cleaning for Particle Removal; 6.1 Introduction 327 $a6.2 Principles of Megasonic Cleaning6.3 Particle Removal Mechanisms During Megasonic Cleaning; 6.4 Types of Megasonic Systems; 6.5 Particle Removal and Feature Damage in Megasonic Cleaning; 6.6 Summary; References; Chapter 7: High Speed Air Jet Removal of Particles from Solid Surfaces; 7.1 Introduction; 7.2 Fundamental Characteristics of the Air Jet; 7.3 Fundamentals of Air Jet Particle Removal; 7.4 New Methods Using Air Jet; 7.5 Summary and Prospect; List of Symbols; References; Chapter 8: Droplet Spray Technique for Particle Removal; 8.1 Introduction; 8.2 Droplet Impact Phenomena 327 $a8.3 Cleaning Process Window8.4 Droplet Spray Technique for Semiconductor Wafer Cleaning; 8.5 Summary; References; Chapter 9: Laser-Induced High-Pressure Micro-Spray Process for Nanoscale Particle Removal; 9.1 Introduction; 9.2 Concept of Droplet Opto-Hydrodynamic Cleaning (DOC); 9.3 Micro-Spray Generation by LIB; 9.4 Mechanisms of Particle Removal by Laser-Induced Spray Jet; 9.5 Generation of Micro-Spray Jet; 9.6 Nanoscale Particle Removal; References; 9.7 Summary; Chapter 10: Wiper-Based Cleaning of Particles from Surfaces; 10.1 Introduction 327 $a10.2 Basic Mechanism of Wiping for Cleaning of Particles and Other Contaminants 330 $a The book provides a comprehensive and easily accessible reference source covering all important aspects of particle adhesion and removal. The core objective is to cover both fundamental and applied aspects of particle adhesion and removal with emphasis on recent developments. Among the topics to be covered include: 1. Fundamentals of surface forces in particle adhesion and removal.2. Mechanisms of particle adhesion and removal.3. Experimental methods (e.g. AFM, SFA,SFM,IFM, etc.) to understand particle-particle and particle-substrate interactions.4. Mechanics of adhesion of micro- and n 410 0$aAdhesion and adhesives. 606 $aAdhesion 606 $aParticles 606 $aPowders 606 $aSurfaces (Technology) 606 $aDust$xRemoval 606 $aCleaning 615 0$aAdhesion. 615 0$aParticles. 615 0$aPowders. 615 0$aSurfaces (Technology) 615 0$aDust$xRemoval. 615 0$aCleaning. 676 $a530.4/17 702 $aMittal$b K. L.$f1945- 702 $aJaiswal$b Ravi 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910820975703321 996 $aParticle adhesion and removal$91959356 997 $aUNINA