LEADER 05660nam 2200709 450 001 9910815042803321 005 20230725034603.0 010 $a1-62198-685-3 010 $a3-03813-609-3 035 $a(CKB)2670000000257034 035 $a(EBL)1872609 035 $a(SSID)ssj0000787351 035 $a(PQKBManifestationID)11466603 035 $a(PQKBTitleCode)TC0000787351 035 $a(PQKBWorkID)10813674 035 $a(PQKB)10904258 035 $a(Au-PeEL)EBL1872609 035 $a(CaPaEBR)ebr10817952 035 $a(OCoLC)875216560 035 $a(MiAaPQ)EBC1872609 035 $a(EXLCZ)992670000000257034 100 $a20110726h20112011 uy| 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aNEMS/MEMS technology and devices $eselected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore /$fedited by Lynn Khine and Julius M. Tsai 210 1$aDurnten-Zurich, Switzerland :$cTrans Tech Publications,$d[2011] 210 4$dİ2011 215 $a1 online resource (233 p.) 225 1 $aAdvanced materials research,$x1022-6680 ;$vvolume 254 300 $aDescription based upon print version of record. 311 $a3-03785-145-7 320 $aIncludes bibliographical references and indexes. 327 $aNEMS/MEMS Technology and Devices, ICMAT2011; Preface; Table of Contents; Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio Sensors; Thick-Film Deposition of High-Viscous Liquid Photopolymer; Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test Application; Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-Cantilever; Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave Structure; Separation Gap Estimation in Dynamic Systems Actuated by Casimir Force 327 $aA Static Micromixer Inspired from Fractal-Like Natural Flow SystemsAlN Actuator for Tunable RFMEMS Capacitor; GEMS: A MEMS-Based Way for the Innervation of Materials; On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory Systems; Design Consideration of Membrane Structure for Thermal Actuated Micropump; Developing High Sensitivity Biomass Sensor Using Lame? Mode Square Resonator; Fabrication of a Peltier Device Based on InSb and SbTe Thin Films; Gapfill Study of Polyimides for MEMS Applications 327 $aA Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorWireless Imaging Module Assembly and Integration for Capsule Endoscopic Applications; Low Cost and High Resolution X-Ray Lithography for Fabrication of Microactuator; FBAR Resonators with Sufficient High Q for RF Filter Implementation; Evaluation of Piezoelectric Properties of AlN Using MEMS Resonators; Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-Osmosis; Silicon Probes for Cochlear Auditory Nerve Stimulation and Measurement 327 $aFocused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer Applications; Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical Implants; Tagging for Capsule Endoscopy Localization; The Negative ?/2 Phase Shift of Total Reflect Light; High Topography Polyimide CMP Process; Hydridosilane Modification of Metals: An Exploratory Study; Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical Rotor 327 $aArea-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmA New Peltier Device with a Coaxial Thermocouple; A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier Device; Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam Lithography; Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS Switches; Double-Step Plasma Etching for SiO2 Microcantilever Release; Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic Resonators 327 $aDevelopment of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried Oxide 330 $aThe emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processes, innovations and engineering applications; especially those related to NEMS/MEMS technologies and devices. A very useful guide to this highly specialized topic. Review from Book News Inc.: Papers from a summer 2011 symposium shed light on new devices, process innovations, and engineering applicati 410 0$aAdvanced materials research ;$vv. 254. 606 $aNanoelectromechanical systems$vCongresses 606 $aMicroelectromechanical systems$vCongresses 610 1 $aNEMS/MEMS technology 610 1 $aMaterials 610 1 $aAdvanced technologies 610 1 $aICMAT 615 0$aNanoelectromechanical systems 615 0$aMicroelectromechanical systems 676 $a233 701 $aKhine$b Lynn$01651546 701 $aTsai$b Julius M$01651547 712 12$aInternational Conference on Materials for Advanced Technologies 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910815042803321 996 $aNEMS$94001553 997 $aUNINA