LEADER 03560nam 22005892 450 001 9910814944703321 005 20151005020621.0 010 $a1-107-23329-1 010 $a1-139-62462-8 010 $a1-107-25359-4 010 $a1-139-03260-7 010 $a1-139-61532-7 010 $a1-139-61160-7 010 $a1-139-62090-8 035 $a(CKB)3460000000129181 035 $a(EBL)1099805 035 $a(OCoLC)842885418 035 $a(UkCbUP)CR9781139032605 035 $a(MiAaPQ)EBC1099805 035 $a(Au-PeEL)EBL1099805 035 $a(CaPaEBR)ebr10695303 035 $a(CaONFJC)MIL485881 035 $a(PPN)261344609 035 $a(EXLCZ)993460000000129181 100 $a20110225d2013|||| uy| 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aElectromechanics and MEMS /$fThomas B. Jones, University of Rochester, New York, Nenad G. Nenadic, Rochester Institute of Technology$b[electronic resource] 210 1$aCambridge :$cCambridge University Press,$d2013. 215 $a1 online resource (xx, 559 pages) $cdigital, PDF file(s) 300 $aTitle from publisher's bibliographic system (viewed on 05 Oct 2015). 311 $a0-521-76483-1 311 $a1-139-60974-2 320 $aIncludes bibliographical references and index. 327 $aMachine generated contents note: 1. Introduction; 2. Circuit-based modeling; 3. Capacitive lumped parameter electromechanics; 4. Small-signal capacitive electromechanical systems; 5. Electromechanics of piezoelectric elements; 6. Capacitive sensing and resonant drive circuits; 7. Distributed 1D and 2D electromechanical structures; 8. Practical MEMS: pressure transducers, accelerometers and gyroscopes; 9. Electromechanics of magnetic MEMS devices; A. Review of quasistatic electromagnetics; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication; D. A brief review of solid mechanics; E. Tables of M- and N-form transducer matrics; F. Finite element analysis as applied to MEMS. 330 $aOffering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles. 517 3 $aElectromechanics & MEMS 606 $aMicroelectromechanical systems 615 0$aMicroelectromechanical systems. 676 $a621.381 686 $aTEC008080$2bisacsh 700 $aJones$b T. B$g(Thomas Byron),$f1944-$01706273 702 $aNenadic$b Nenad G. 801 0$bUkCbUP 801 1$bUkCbUP 906 $aBOOK 912 $a9910814944703321 996 $aElectromechanics and MEMS$94093572 997 $aUNINA