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100   $a20130410d2013      uy         0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aReliability of MEMS $etesting of materials and devices /$fedited by Osamu Tabata, Toshiyuki Tsuchiya
205   $a2nd ed.
210   $aWeinheim $cWiley-VCH$d2013
215   $a1 online resource (325 p.)
225 1 $aAdvanced micro & nanosystems
300   $aFirst edition 2007.
311   $a3-527-33501-3 
320   $aIncludes bibliographical references and index.
327   $aTitle Page; Preface; Foreword; Contents; List of Contributors; Overview; 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization; 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating - Substrate Systems; 3 Thin film Characterization Using the Bulge Test; 4 Uniaxial Tensile Test for MEMS Materials; 5 On chip Testing of MEMS; 6 Reliability of a Capacitive Pressure Sensor; 7 Inertial Sensors; 8 High accuracy, High reliability MEMS Accelerometer; 9 Reliability of MEMS Variable Optical Attenuator; 10 Eco Scan MEMS Resonant Mirror; Index
330   $aNow available in softcover, this book closely examines the enabling technologies for the fabrication of micro- and nanodevices. Divided into two clearly structured sections, the first begins with an insider's view of industrial MEMS commercialization, followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, as well as the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the
410  0$aAdvanced micro & nanosystems.
606   $aMicroelectromechanical systems$xReliability
615  0$aMicroelectromechanical systems$xReliability.
676   $a539.60113
701   $aTabata$b Osamu$0892953
701   $aTsuchiya$b Toshiyuki$01667640
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910814657603321
996   $aReliability of MEMS$94027600
997   $aUNINA