LEADER 02900nam 2200577 a 450 001 9910808833503321 005 20230725031517.0 010 $a1-283-14355-0 010 $a9786613143556 010 $a981-283-668-3 035 $a(CKB)2670000000095724 035 $a(EBL)731284 035 $a(OCoLC)738433338 035 $a(SSID)ssj0000640860 035 $a(PQKBManifestationID)12291473 035 $a(PQKBTitleCode)TC0000640860 035 $a(PQKBWorkID)10621954 035 $a(PQKB)10224664 035 $a(MiAaPQ)EBC731284 035 $a(WSP)00007094 035 $a(Au-PeEL)EBL731284 035 $a(CaPaEBR)ebr10480049 035 $a(CaONFJC)MIL314355 035 $a(EXLCZ)992670000000095724 100 $a20110712d2011 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aScanning electron microscope optics and spectrometers$b[electronic resource] /$fAnjam Khursheed 210 $aSingapore ;$aHackensack, N.J. $cWorld Scientific Pub. Co.$d2011 215 $a1 online resource (400 p.) 300 $aDescription based upon print version of record. 311 $a981-283-667-5 320 $aIncludes bibliographical references and index. 327 $aDedication; Preface; Contents; Chapter 1 Conventional SEM Design; Chapter 2 Spectrometer Design Principles; Chapter 3 In-lens Improvements; Chapter 4 Sub-nanometer Probe Diameters; Chapter 5 Secondary Electron Spectrometers; Chapter 6 Full Range Deflector Spectrometer Designs; Chapter 7 Full Range Parallel Energy Spectrometer Designs; Chapter 8 Spectroscopic SEM proposals; Appendix 1.0 Field Expansions; Appendix 1.1 Derivation of the Paraxial Equation; Appendix 1.2 Spherical Aberration; Appendix 1.3 Chromatic Aberration; Appendix 2 Multipole Lenses; Bibliography; Index 330 $aThis book contains proposals to redesign the scanning electron microscope, so that it is more compatible with other charged particle beam instrumentation and analytical techniques commonly used in surface science research. It emphasizes the concepts underlying spectrometer designs in the scanning electron microscope, and spectrometers are discussed under one common framework so that their relative strengths and weaknesses can be more readily appreciated. This is done, for the most part, through simulations and derivations carried out by the author himself. The book is aimed at scientists, engi 606 $aScanning electron microscopes 606 $aOptical spectrometers 615 0$aScanning electron microscopes. 615 0$aOptical spectrometers. 676 $a681.413 700 $aKhursheed$b Anjam$028240 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910808833503321 996 $aScanning electron microscope optics and spectrometers$94051390 997 $aUNINA