LEADER 01551nam 2200517 450 001 9910806168903321 005 20200520144314.0 035 $a(CKB)3340000000002982 035 $a(Au-PeEL)EBL2046423 035 $a(CaPaEBR)ebr11053062 035 $a(CaONFJC)MIL271176 035 $a(OCoLC)909142789 035 $a(MiAaPQ)EBC2046423 035 $a(PPN)198680236 035 $a(EXLCZ)993340000000002982 100 $a20151126h20152015 uy 0 101 0 $aeng 135 $aurcnu|||||||| 181 $2rdacontent 182 $2rdamedia 183 $2rdacarrier 200 10$aMicromanufacturing engineering and technology /$fYi Qin 205 $aSecond edition. 210 1$aAmsterdam, [Netherlands] :$cWilliam Andrew,$d2015. 210 4$dİ2015 215 $a1 online resource (859 pages) $cillustrations, tables 225 1 $aMicro & Nano Technologies 311 $a0-323-31149-0 311 $a0-323-31267-5 320 $aIncludes bibliographical references at the end of each chapters and index. 410 0$aMicro & nano technologies. 606 $aProduction engineering 606 $aManufacturing processes 606 $aMicrotechnology 615 0$aProduction engineering. 615 0$aManufacturing processes. 615 0$aMicrotechnology. 676 $a658.5 700 $aQin$b Yi$01651558 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910806168903321 996 $aMicromanufacturing engineering and technology$94038320 997 $aUNINA