LEADER 02262oam 2200421I 450 001 9910793625703321 005 20230817180631.0 010 $a0-429-03192-0 010 $a0-429-62687-8 010 $a0-429-62851-X 035 $a(CKB)4100000008485456 035 $a(MiAaPQ)EBC5789239 035 $a(OCoLC)1104839807$z(OCoLC)1104870601 035 $a(OCoLC-P)1104839807 035 $a(FlBoTFG)9780429031922 035 $a(EXLCZ)994100000008485456 100 $a20190618d2019 uy 0 101 0 $aeng 135 $aurcnu---unuuu 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aNanoimprinting and its applications /$fedited by Akihiro Miyauchi 210 1$aSingapore :$cJenny Stanford Publishing,$d[2019] 210 4$dİ2019 215 $a1 online resource (210 pages) 311 $a981-4800-37-6 330 $aNanoimprinting has grown rapidly since it was proposed in 1995 by Prof. Chou. Now machines, resins, and molds for nanoimprinting are commercially available worldwide. The application fields of nanoimprinting are expanding to not only electronics but also optics, biology, and energy because nanoimprinting is a simple and convenient method for nanofabrication, and some devices are now being mass-produced. In the near future, the application of nanoimprinting in display and semiconductor fields is expected. This book explains the fundamentals of nanoimprinting in terms of materials, processes, and machines. It also describes the applications of nanoimprinting in optics, biology, energy, and electronics. In addition, it includes as many practical examples of nanoimprinting as possible. The fundamentals will help advanced undergraduate and graduate students understand nanoimprinting. The examples will be useful for both researchers working in nanoimprinting for the first time and engineers involved in research and development of various devices using nanostructures. 606 $aNanolithography 615 0$aNanolithography. 676 $a621.381531 702 $aMiyauchi$b Akihiro 801 0$bOCoLC-P 801 1$bOCoLC-P 906 $aBOOK 912 $a9910793625703321 996 $aNanoimprinting and its applications$93813010 997 $aUNINA