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100   $a20180331d2013      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aCMOS nanoelectronics $einnovative devices, architectures, and applications /$fedited by Nadine Collaert
210  1$aSingapore :$cPan Stanford Pub.,$d2013.
215   $a1 online resource (444 p.)
300   $aDescription based upon print version of record.
311   $a1-322-63325-8 
311   $a981-4364-02-9 
320   $aIncludes bibliographical references.
327   $aFront Cover; Contents; Preface; I. Integration of Multi-Gate Devices (FinFET); 1. Introduction to Multi-Gate Devices and Integration Challenges; 2. Dry Etching Patterning Requirements for Multi-Gate Devices; 3. High-k Dielectrics and Metal Gate Electrodes on SOI MuGFETs; 4. Doping, Contact and Strain Architectures for Highly Scaled FinFETs; II. Circuit-Related Aspects; 5. Variability and Its Implications for FinFET SRAM; 6. Specific Features of MuGFETs at High Temperatures over a Wide Frequency Range; 7. ESD Protection in FinFET Technology; III. Exploratory Devices and Characterization Tools
327   $a8. The Junctionless Nanowire Transistor9. The Variational Principle: A Valuable Ally Assisting the Self-Consistent Solution of Poisson's Equation and Semi-Classical Transport Equations; 10. New Tools for the Direct Characterisation of FinFETS; 11. Dopant Metrology in Advanced FinFETs
330   $aThis book covers one of the most important device architectures that have been widely researched to extend the transistor scaling: FinFET. Starting with theory, the book discusses the advantages and the integration challenges of this device architecture. It addresses in detail the topics such as high-density fin patterning, gate stack design, and source/drain engineering, which have been considered challenges for the integration of FinFETs. The book also addresses circuit-related aspects, including the impact of variability on SRAM design, ESD design, and high-T operation. It discusses a new d
606   $aMolecular electronics
606   $aNanotechnology
615  0$aMolecular electronics.
615  0$aNanotechnology.
676   $a621.3815
701   $aCollaert$b Nadine$01576602
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910785920503321
996   $aCMOS nanoelectronics$93854483
997   $aUNINA