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100   $a20180331d2010      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aAdhesion aspects in MEMS-NEMS /$fedited by S. H. Kim, M. T. Dugger and K. L. Mittal
210  1$aLeiden ;$aBoston :$cBrill ;$aBiggleswade :$cExtenza Turpin [distributor],$d2010.
215   $a1 online resource (424 p.)
300   $aDescription based upon print version of record.
311   $a90-04-19094-5 
320   $aIncludes bibliographical references.
327   $apt. 1. Understanding through continuum theory -- pt. 2. Computer simulation of interfaces -- pt. 3. Adhesion and friction measurements -- pt. 4. Adhesion in practical applications -- pt. 5. Adhesion mitigation strategies.
330   $aPhenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface
606   $aMicroelectromechanical systems
606   $aNanoelectromechanical systems
606   $aAdhesion
606   $aSurfaces (Technology)
615  0$aMicroelectromechanical systems.
615  0$aNanoelectromechanical systems.
615  0$aAdhesion.
615  0$aSurfaces (Technology)
676   $a621.381
701   $aKim$b Seong H$01500254
701   $aDugger$b Michael T$01500255
701   $aMittal$b K. L.$f1945-$0748276
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910785903303321
996   $aAdhesion aspects in MEMS-NEMS$93726843
997   $aUNINA